30 GHz Surface Acoustic Wave Transducers with Extremely High Mass Sensitivity

Jiangpo Zheng, Jian Zhou, Pei Zeng, Yi Liu, Yiping Shen, Wenze Yao, Zhe Chen, Jianhui Wu, Shuo Xiong, Yiqin Chen, Xianglong Shi, Jie Liu, Richard Fu, Huiguo Duan

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Abstract

A nano-patterning process is reported in this paper, which can achieve surface acoustic wave (SAW) devices with an extremely high frequency and a super-high mass sensitivity. An integrated lift-off process with ion beam milling is used to minimize short-circuiting problem and improve quality of nanoscale interdigital transducers (IDTs). A specifically designed PEC algorithm is applied to mitigate proximity effects occurring in the conventional electron-beam lithography process. The IDTs with a period of 160 nm and a finger width of 35 nm are achieved, enabling a frequency of 30 GHz on lithium niobate based SAW devices. Both centrosymmetric type and axisymmetric type IDT structures are fabricated and results show that the centrosymmetric type tends to excite lower-order Rayleigh waves, and the axisymmetric type tends to excite higher-order wave modes. A super-high mass sensitivity of ~388.2 MHzmm2/μg is demonstrated, which is 109 times larger than that of a conventional quartz crystal balance and 50 times higher than a conventional SAW device with a wavelength of 4 m.
Original languageEnglish
Article number123502
JournalApplied Physics Letters
Volume116
Issue number12
DOIs
Publication statusPublished - 23 Mar 2020

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