A nano-patterning process is reported in this paper, which can achieve surface acoustic wave (SAW) devices with an extremely high frequency and a super-high mass sensitivity. An integrated lift-off process with ion beam milling is used to minimize short-circuiting problem and improve quality of nanoscale interdigital transducers (IDTs). A specifically designed PEC algorithm is applied to mitigate proximity effects occurring in the conventional electron-beam lithography process. The IDTs with a period of 160 nm and a finger width of 35 nm are achieved, enabling a frequency of 30 GHz on lithium niobate based SAW devices. Both centrosymmetric type and axisymmetric type IDT structures are fabricated and results show that the centrosymmetric type tends to excite lower-order Rayleigh waves, and the axisymmetric type tends to excite higher-order wave modes. A super-high mass sensitivity of ~388.2 MHzmm2/μg is demonstrated, which is 109 times larger than that of a conventional quartz crystal balance and 50 times higher than a conventional SAW device with a wavelength of 4 m.