A 35-μm Pitch IR Thermo-Mechanical MEMS Sensor With AC-Coupled Optical Readout

Physics

• Microelectromechanical System 100%
• Responses 8%
• Performance 8%
• Deflection 8%
• Terms 8%
• Images 8%
• Plane 8%
• Heating 8%
• Temperature Gradients 8%
• Diffraction Grating 8%
• Infrared Spectrum 8%

Engineering

• Sensor 25%
• Performance 8%
• Design 8%
• Deflection 8%
• Heating 8%
• Images 8%
• Temperature Difference 8%
• Detection Scheme 8%
• Lenses 8%
• Pitch 8%
• Nanometre 8%
• Noise Level 8%
• Pixel Pitch 8%
• Equivalent Temperature 8%
• Sensor Array 8%