A MEMS-based terahertz detector with metamaterial-based absorber and optical interferometric readout

Habib Bilgin; Shahrzad Zahertar; Seyedehayda Sadeghzadeh; Arda Yalcinkaya; Hamdi Torun

doi:10.1016/j.sna.2016.04.021

A MEMS-based terahertz detector with metamaterial-based absorber and optical interferometric readout

Habib Bilgin, Shahrzad Zahertar, Seyedehayda Sadeghzadeh, Arda Yalcinkaya, Hamdi Torun^*

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

20 Citations (Scopus)

Abstract

A MEMS based novel THz detector structure is designed and realized by micro fabrication. The detector is then characterized to extract its mechanical performance. Operating in 0.5–2 THz band, the detector has a pixel size of 200 μm × 200 μm. Bimaterial suspension legs consist of Parylene-C and titanium, the pair of which provides a high mismatch in coefficients of thermal expansion. The pixel is a suspended Parylene-C structure having a 200 nm-thick titanium metallization. Operation principle relies on conversion of absorbed THz radiation into heat energy on the pixel. This increases the temperature of the free-standing microstructure that is thermally isolated from the substrate. The increase in temperature induces mechanical deflection due to bimaterial springs. The detector is designed to deliver a detectivity (D*) of 2 × 109 cm Hz−1/2/W and a refresh rate of 20 Hz.

Original language	English
Pages (from-to)	292-298
Journal	Sensors and Actuators A: Physical
Volume	244
Early online date	30 Apr 2016
DOIs	https://doi.org/10.1016/j.sna.2016.04.021
Publication status	Published - 15 Jun 2016
Externally published	Yes

Keywords

MEMS
Terahertz technology
Metamaterials
Microfabrication
Optical readout

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

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10.1016/j.sna.2016.04.021

Cite this

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title = "A MEMS-based terahertz detector with metamaterial-based absorber and optical interferometric readout",

abstract = "A MEMS based novel THz detector structure is designed and realized by micro fabrication. The detector is then characterized to extract its mechanical performance. Operating in 0.5–2 THz band, the detector has a pixel size of 200 μm × 200 μm. Bimaterial suspension legs consist of Parylene-C and titanium, the pair of which provides a high mismatch in coefficients of thermal expansion. The pixel is a suspended Parylene-C structure having a 200 nm-thick titanium metallization. Operation principle relies on conversion of absorbed THz radiation into heat energy on the pixel. This increases the temperature of the free-standing microstructure that is thermally isolated from the substrate. The increase in temperature induces mechanical deflection due to bimaterial springs. The detector is designed to deliver a detectivity (D*) of 2 × 109 cm Hz−1/2/W and a refresh rate of 20 Hz.",

keywords = "MEMS, Terahertz technology, Metamaterials, Microfabrication, Optical readout",

author = "Habib Bilgin and Shahrzad Zahertar and Seyedehayda Sadeghzadeh and Arda Yalcinkaya and Hamdi Torun",

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doi = "10.1016/j.sna.2016.04.021",

language = "English",

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journal = "Sensors and Actuators A: Physical",

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T1 - A MEMS-based terahertz detector with metamaterial-based absorber and optical interferometric readout

AU - Bilgin, Habib

AU - Zahertar, Shahrzad

AU - Sadeghzadeh, Seyedehayda

AU - Yalcinkaya, Arda

AU - Torun, Hamdi

PY - 2016/6/15

Y1 - 2016/6/15

N2 - A MEMS based novel THz detector structure is designed and realized by micro fabrication. The detector is then characterized to extract its mechanical performance. Operating in 0.5–2 THz band, the detector has a pixel size of 200 μm × 200 μm. Bimaterial suspension legs consist of Parylene-C and titanium, the pair of which provides a high mismatch in coefficients of thermal expansion. The pixel is a suspended Parylene-C structure having a 200 nm-thick titanium metallization. Operation principle relies on conversion of absorbed THz radiation into heat energy on the pixel. This increases the temperature of the free-standing microstructure that is thermally isolated from the substrate. The increase in temperature induces mechanical deflection due to bimaterial springs. The detector is designed to deliver a detectivity (D*) of 2 × 109 cm Hz−1/2/W and a refresh rate of 20 Hz.

AB - A MEMS based novel THz detector structure is designed and realized by micro fabrication. The detector is then characterized to extract its mechanical performance. Operating in 0.5–2 THz band, the detector has a pixel size of 200 μm × 200 μm. Bimaterial suspension legs consist of Parylene-C and titanium, the pair of which provides a high mismatch in coefficients of thermal expansion. The pixel is a suspended Parylene-C structure having a 200 nm-thick titanium metallization. Operation principle relies on conversion of absorbed THz radiation into heat energy on the pixel. This increases the temperature of the free-standing microstructure that is thermally isolated from the substrate. The increase in temperature induces mechanical deflection due to bimaterial springs. The detector is designed to deliver a detectivity (D*) of 2 × 109 cm Hz−1/2/W and a refresh rate of 20 Hz.

KW - MEMS

KW - Terahertz technology

KW - Metamaterials

KW - Microfabrication

KW - Optical readout

U2 - 10.1016/j.sna.2016.04.021

DO - 10.1016/j.sna.2016.04.021

M3 - Article

SN - 0924-4247

VL - 244

SP - 292

EP - 298

JO - Sensors and Actuators A: Physical

JF - Sensors and Actuators A: Physical

ER -

A MEMS-based terahertz detector with metamaterial-based absorber and optical interferometric readout

Abstract

Keywords

UN SDGs

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