A MEMS-based terahertz detector with metamaterial-based absorber and optical interferometric readout

Habib Bilgin, Shahrzad Zahertar, Seyedehayda Sadeghzadeh, Arda Yalcinkaya, Hamdi Torun*

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

12 Citations (Scopus)

Abstract

A MEMS based novel THz detector structure is designed and realized by micro fabrication. The detector is then characterized to extract its mechanical performance. Operating in 0.5–2 THz band, the detector has a pixel size of 200 μm × 200 μm. Bimaterial suspension legs consist of Parylene-C and titanium, the pair of which provides a high mismatch in coefficients of thermal expansion. The pixel is a suspended Parylene-C structure having a 200 nm-thick titanium metallization. Operation principle relies on conversion of absorbed THz radiation into heat energy on the pixel. This increases the temperature of the free-standing microstructure that is thermally isolated from the substrate. The increase in temperature induces mechanical deflection due to bimaterial springs. The detector is designed to deliver a detectivity (D*) of 2 × 109 cm Hz−1/2/W and a refresh rate of 20 Hz.
Original languageEnglish
Pages (from-to)292-298
JournalSensors and Actuators A: Physical
Volume244
Early online date30 Apr 2016
DOIs
Publication statusPublished - 15 Jun 2016
Externally publishedYes

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