A multifractal study of al thin films prepared by rf magnetron sputtering

F. M. Mwema; Esther T. Akinlabi; O. P. Oladijo; Stephen A. Akinlabi; S. Hassan

doi:10.1007/978-981-15-5753-8_63

A multifractal study of al thin films prepared by rf magnetron sputtering

F. M. Mwema^*, Esther T. Akinlabi, O. P. Oladijo, Stephen A. Akinlabi, S. Hassan

^*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

1 Citation (Scopus)

Abstract

In this article, a multi-fractal approach has been employed to study the micromorphology of sputtered aluminium films by radio frequency magnetron sputtering method. The films were prepared at 150 and 200 W on stainless and mild steel substrates of 50 mm by 50 mm by 3 mm dimensions. The substrates and targets were maintained at room temperature. The surface microstructures of the films were imaged using atomic force microscopy (AFM). The images were then subjected to the cube counting method to calculate the fractal dimension (D) and multifractal analysis to comprehend the complex nature of the sputtered Al films. The results show that the fractal dimension increases with power for mild steel substrates and decreases with RF power for stainless steel substrates. The multifractal behaviour determined through mass exponent as a function of moment order, singularity strength as a function of singularity exponent, and generalized fractal dimension as a function of moment order reveals that all the films are multifractal in nature.

Original language	English
Title of host publication	Advances in Manufacturing Engineering - Selected Articles from ICMMPE 2019
Editors	Seyed Sattar Emamian, Farazila Yusof, Mokhtar Awang
Publisher	Springer
Pages	687-694
Number of pages	8
ISBN (Print)	9789811557521
DOIs	https://doi.org/10.1007/978-981-15-5753-8_63
Publication status	Published - 2020
Externally published	Yes
Event	5th International Conference on Mechanical, Manufacturing and Plant Engineering, ICMMPE 2019 - Kuala Lumpur, Malaysia Duration: 19 Nov 2019 → 21 Nov 2019

Publication series

Name	Lecture Notes in Mechanical Engineering
ISSN (Print)	2195-4356
ISSN (Electronic)	2195-4364

Conference

Conference	5th International Conference on Mechanical, Manufacturing and Plant Engineering, ICMMPE 2019
Country/Territory	Malaysia
City	Kuala Lumpur
Period	19/11/19 → 21/11/19

Keywords

Aluminium
Atomic force microscopy (AFM)
Microstructure
Multifractal theory
Radio-frequency sputtering
Sputtering power
Substrates
Thinfilms

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10.1007/978-981-15-5753-8_63

Cite this

Mwema, F. M., Akinlabi, E. T., Oladijo, O. P., Akinlabi, S. A., & Hassan, S. (2020). A multifractal study of al thin films prepared by rf magnetron sputtering. In S. S. Emamian, F. Yusof, & M. Awang (Eds.), Advances in Manufacturing Engineering - Selected Articles from ICMMPE 2019 (pp. 687-694). (Lecture Notes in Mechanical Engineering). Springer. https://doi.org/10.1007/978-981-15-5753-8_63

@inproceedings{7f0c758e4a1b4c1883d739a09c471bc0,

title = "A multifractal study of al thin films prepared by rf magnetron sputtering",

abstract = "In this article, a multi-fractal approach has been employed to study the micromorphology of sputtered aluminium films by radio frequency magnetron sputtering method. The films were prepared at 150 and 200 W on stainless and mild steel substrates of 50 mm by 50 mm by 3 mm dimensions. The substrates and targets were maintained at room temperature. The surface microstructures of the films were imaged using atomic force microscopy (AFM). The images were then subjected to the cube counting method to calculate the fractal dimension (D) and multifractal analysis to comprehend the complex nature of the sputtered Al films. The results show that the fractal dimension increases with power for mild steel substrates and decreases with RF power for stainless steel substrates. The multifractal behaviour determined through mass exponent as a function of moment order, singularity strength as a function of singularity exponent, and generalized fractal dimension as a function of moment order reveals that all the films are multifractal in nature.",

keywords = "Aluminium, Atomic force microscopy (AFM), Microstructure, Multifractal theory, Radio-frequency sputtering, Sputtering power, Substrates, Thinfilms",

author = "Mwema, {F. M.} and Akinlabi, {Esther T.} and Oladijo, {O. P.} and Akinlabi, {Stephen A.} and S. Hassan",

note = "Funding Information: Acknowledgements The Global Excellence and Stature (GES) 4.0 funding for Postdoctoral Research Fellowship by the University of Johannesburg is acknowledged. Publisher Copyright: {\textcopyright} Springer Nature Singapore Pte Ltd 2020.; 5th International Conference on Mechanical, Manufacturing and Plant Engineering, ICMMPE 2019 ; Conference date: 19-11-2019 Through 21-11-2019",

year = "2020",

doi = "10.1007/978-981-15-5753-8_63",

language = "English",

isbn = "9789811557521",

series = "Lecture Notes in Mechanical Engineering",

publisher = "Springer",

pages = "687--694",

editor = "Emamian, {Seyed Sattar} and Farazila Yusof and Mokhtar Awang",

booktitle = "Advances in Manufacturing Engineering - Selected Articles from ICMMPE 2019",

address = "Germany",

}

Mwema, FM , Akinlabi, ET, Oladijo, OP, Akinlabi, SA & Hassan, S 2020, A multifractal study of al thin films prepared by rf magnetron sputtering. in SS Emamian, F Yusof & M Awang (eds), Advances in Manufacturing Engineering - Selected Articles from ICMMPE 2019. Lecture Notes in Mechanical Engineering, Springer, pp. 687-694, 5th International Conference on Mechanical, Manufacturing and Plant Engineering, ICMMPE 2019, Kuala Lumpur, Malaysia, 19/11/19. https://doi.org/10.1007/978-981-15-5753-8_63

A multifractal study of al thin films prepared by rf magnetron sputtering. / Mwema, F. M.; Akinlabi, Esther T.; Oladijo, O. P. et al.
Advances in Manufacturing Engineering - Selected Articles from ICMMPE 2019. ed. / Seyed Sattar Emamian; Farazila Yusof; Mokhtar Awang. Springer, 2020. p. 687-694 (Lecture Notes in Mechanical Engineering).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - A multifractal study of al thin films prepared by rf magnetron sputtering

AU - Mwema, F. M.

AU - Akinlabi, Esther T.

AU - Oladijo, O. P.

AU - Akinlabi, Stephen A.

AU - Hassan, S.

N1 - Funding Information: Acknowledgements The Global Excellence and Stature (GES) 4.0 funding for Postdoctoral Research Fellowship by the University of Johannesburg is acknowledged. Publisher Copyright: © Springer Nature Singapore Pte Ltd 2020.

PY - 2020

Y1 - 2020

N2 - In this article, a multi-fractal approach has been employed to study the micromorphology of sputtered aluminium films by radio frequency magnetron sputtering method. The films were prepared at 150 and 200 W on stainless and mild steel substrates of 50 mm by 50 mm by 3 mm dimensions. The substrates and targets were maintained at room temperature. The surface microstructures of the films were imaged using atomic force microscopy (AFM). The images were then subjected to the cube counting method to calculate the fractal dimension (D) and multifractal analysis to comprehend the complex nature of the sputtered Al films. The results show that the fractal dimension increases with power for mild steel substrates and decreases with RF power for stainless steel substrates. The multifractal behaviour determined through mass exponent as a function of moment order, singularity strength as a function of singularity exponent, and generalized fractal dimension as a function of moment order reveals that all the films are multifractal in nature.

AB - In this article, a multi-fractal approach has been employed to study the micromorphology of sputtered aluminium films by radio frequency magnetron sputtering method. The films were prepared at 150 and 200 W on stainless and mild steel substrates of 50 mm by 50 mm by 3 mm dimensions. The substrates and targets were maintained at room temperature. The surface microstructures of the films were imaged using atomic force microscopy (AFM). The images were then subjected to the cube counting method to calculate the fractal dimension (D) and multifractal analysis to comprehend the complex nature of the sputtered Al films. The results show that the fractal dimension increases with power for mild steel substrates and decreases with RF power for stainless steel substrates. The multifractal behaviour determined through mass exponent as a function of moment order, singularity strength as a function of singularity exponent, and generalized fractal dimension as a function of moment order reveals that all the films are multifractal in nature.

KW - Aluminium

KW - Atomic force microscopy (AFM)

KW - Microstructure

KW - Multifractal theory

KW - Radio-frequency sputtering

KW - Sputtering power

KW - Substrates

KW - Thinfilms

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U2 - 10.1007/978-981-15-5753-8_63

DO - 10.1007/978-981-15-5753-8_63

M3 - Conference contribution

AN - SCOPUS:85091271899

SN - 9789811557521

T3 - Lecture Notes in Mechanical Engineering

SP - 687

EP - 694

BT - Advances in Manufacturing Engineering - Selected Articles from ICMMPE 2019

A2 - Emamian, Seyed Sattar

A2 - Yusof, Farazila

A2 - Awang, Mokhtar

PB - Springer

T2 - 5th International Conference on Mechanical, Manufacturing and Plant Engineering, ICMMPE 2019

Y2 - 19 November 2019 through 21 November 2019

ER -

A multifractal study of al thin films prepared by rf magnetron sputtering

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Keywords

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