A novel smart pressure and temperature sensor with AI

This paper focuses on creating a new type of smart pressure sensor that uses advanced artificial intelligence (AI) to measure pressure and temperature simultaneously more precisely and reliably than traditional methods. The sensor works by detecting both pressure and temperature differences, which are converted into tiny electrical signals. These signals are then processed using AI to ensure accuracy. An Si-based device structure with thermopile was designed for this sensor. The model is simulated with Python. Long Short-Term Memory (LSTM) deep learning model is implemented to separate the pressure and temperature signal. The AI successfully separated the pressure signal from the temperature signal with minimal error, demonstrating that the neural network effectively learned this sensor's characteristics.