A robust, fine pitch probe card

M. C. Rosamond; A. J. Gallant; David Wood; J Brugger; D Briand

doi:10.1016/j.proche.2009.07.197

A robust, fine pitch probe card

M. C. Rosamond, A. J. Gallant, David Wood, J Brugger, D Briand

Research output: Contribution to journal › Article › peer-review

1 Citation (Scopus)

Abstract

A new type of probe card is described which consists of inclined nickel cantilevers formed on top of a three dimensional PDMS layer. A prototype card has been built with an in-line pitch of 23 ?m. The presence of a PDMS layer beneath the cantilevers creates mechanically robust probes. The probes can apply up to 100 mN contact force and be deflected up to 40 ?m without damage. Typical contact resistances of less than 5 ? against gold and 15 ? against copper are reported. The leakage current between adjacent probes is less than 1 nA measured at 100 V.

Original language	English
Pages (from-to)	792-795
Number of pages	4
Journal	Procedia chemistry.
Volume	1
Issue number	1
DOIs	https://doi.org/10.1016/j.proche.2009.07.197
Publication status	Published - 1 Sept 2009

Keywords

Probe card
PDMS
Greyscale lithography
Fine pitch
Robust

Access to Document

10.1016/j.proche.2009.07.197Licence: CC BY-NC-ND

Cite this

@article{349859aed18e42cbbcd62c055430eb0a,

title = "A robust, fine pitch probe card",

abstract = "A new type of probe card is described which consists of inclined nickel cantilevers formed on top of a three dimensional PDMS layer. A prototype card has been built with an in-line pitch of 23 ?m. The presence of a PDMS layer beneath the cantilevers creates mechanically robust probes. The probes can apply up to 100 mN contact force and be deflected up to 40 ?m without damage. Typical contact resistances of less than 5 ? against gold and 15 ? against copper are reported. The leakage current between adjacent probes is less than 1 nA measured at 100 V.",

keywords = "Probe card, PDMS, Greyscale lithography, Fine pitch, Robust",

author = "Rosamond, \{M. C.\} and Gallant, \{A. J.\} and David Wood and J Brugger and D Briand",

note = "Proceedings of the 23rd Eurosensors XXIII conference, Lausanne, Switzerland 6-9 September 2009",

year = "2009",

month = sep,

day = "1",

doi = "10.1016/j.proche.2009.07.197",

language = "English",

volume = "1",

pages = "792--795",

journal = "Procedia chemistry.",

issn = "1876-6196",

publisher = "Elsevier B.V.",

number = "1",

}

TY - JOUR

T1 - A robust, fine pitch probe card

AU - Rosamond, M. C.

AU - Gallant, A. J.

AU - Wood, David

AU - Brugger, J

AU - Briand, D

N1 - Proceedings of the 23rd Eurosensors XXIII conference, Lausanne, Switzerland 6-9 September 2009

PY - 2009/9/1

Y1 - 2009/9/1

N2 - A new type of probe card is described which consists of inclined nickel cantilevers formed on top of a three dimensional PDMS layer. A prototype card has been built with an in-line pitch of 23 ?m. The presence of a PDMS layer beneath the cantilevers creates mechanically robust probes. The probes can apply up to 100 mN contact force and be deflected up to 40 ?m without damage. Typical contact resistances of less than 5 ? against gold and 15 ? against copper are reported. The leakage current between adjacent probes is less than 1 nA measured at 100 V.

AB - A new type of probe card is described which consists of inclined nickel cantilevers formed on top of a three dimensional PDMS layer. A prototype card has been built with an in-line pitch of 23 ?m. The presence of a PDMS layer beneath the cantilevers creates mechanically robust probes. The probes can apply up to 100 mN contact force and be deflected up to 40 ?m without damage. Typical contact resistances of less than 5 ? against gold and 15 ? against copper are reported. The leakage current between adjacent probes is less than 1 nA measured at 100 V.

KW - Probe card

KW - PDMS

KW - Greyscale lithography

KW - Fine pitch

KW - Robust

UR - https://www.scopus.com/pages/publications/71549123695

U2 - 10.1016/j.proche.2009.07.197

DO - 10.1016/j.proche.2009.07.197

M3 - Article

SN - 1876-6196

VL - 1

SP - 792

EP - 795

JO - Procedia chemistry.

JF - Procedia chemistry.

IS - 1

ER -

A robust, fine pitch probe card

Abstract

Keywords

Access to Document

Other files and links

Fingerprint

Cite this