A silicon-on-insulator based micro check valve

Min Hu, Hejun Du, Shih-Fu Ling, Yong Qing Fu, Quanfang Chen, Louis Chow, Bo Li

Research output: Contribution to journalArticlepeer-review

32 Citations (Scopus)


In this paper we present a bulk micromachined check valve with very high frequency and extremely low leak rates. The valve is designed to have a hexagonal orifice, a hexagonal membrane flap and three flexible tethers. The three elbow-shaped flexible tethers are used to secure the membrane flap to the valve seat and to obtain large flap displacement in the forward flow direction. A silicon-on-insulator wafer and deep reactive ion etching technology are used to implement this microvalve. A very simple fabrication process has been developed, and only two photolithographic masks are required. Preliminary fluidics testing on a 1.44 mm size check valve was performed. A maximum flow rate (deionized water) of 35.6 ml min−1 was obtained at a forward pressure of 65.5 kPa, and only negligible leakage rate was observed at a reverse pressure of up to 600 kPa. The frequency response of the valve in air was also measured and its first resonance frequency was found at 17.7 kHz.
Original languageEnglish
Pages (from-to)382-387
JournalJournal of Micromechanics and Microengineering
Issue number3
Publication statusPublished - Mar 2003


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