A Surface Acoustic Wave-Based Immunosensing Device Using a Nanocrystalline ZnO Film on Si

Dae-Sik Lee, Jun Hwang Lee, Jikui Luo, Yong Qing Fu, William Milne, Sunglyul Maeng, Mun Yeon Jung, Sun Hee Park, Hyun Yoon

Research output: Contribution to journalArticlepeer-review

13 Citations (Scopus)

Abstract

The novelty of this study resides in the fabrication of a bio-sensing device, based on the surface acoustic wave (SAW) on a nanocrystalline ZnO film. The ZnO film was deposited using an rf magnetron sputtering at room temperature on silicon. The deposited films showed the c-axis-oriented crystallite with grain size of ∼40 nm. The immunosensing device was fabricated using photolithographic protocols on the film. As a model biomolecular recognition and immunosensing, biospecific interaction between a 6-(2,4-dinitrophenyl)aminohexanoic acid (DNP) antigen and its antibody was employed, demonstrating the shifts of resonant frequencies on SAW immunosensing device. The device exhibited a linearity as a function of the antibody concentration in the range of 20∼20,000 ng/ml.
Original languageEnglish
Pages (from-to)7181-7185
JournalJournal of Nanoscience and Nanotechnology
Volume9
Issue number12
DOIs
Publication statusPublished - Dec 2009

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