A systematic review of magnetron sputtering of AlN thin films for extreme condition sensing

Research output: Contribution to journal › Article › peer-review

17 Citations (Scopus)

Original language	Undefined/Unknown
Journal	Materials Today: Proceedings
DOIs	https://doi.org/10.1016/j.matpr.2020.02.317
Publication status	Published - Mar 2020

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@article{81275c792ef14f69866595ee73a0ccaa,

title = "A systematic review of magnetron sputtering of AlN thin films for extreme condition sensing",

author = "F.M. Mwema and E.T. Akinlabi and O.P. Oladijo",

year = "2020",

month = mar,

doi = "10.1016/j.matpr.2020.02.317",

language = "Undefined/Unknown",

journal = "Materials Today: Proceedings",

issn = "2214-7853",

publisher = "Elsevier",

}

TY - JOUR

T1 - A systematic review of magnetron sputtering of AlN thin films for extreme condition sensing

AU - Mwema, F.M.

AU - Akinlabi, E.T.

AU - Oladijo, O.P.

PY - 2020/3

Y1 - 2020/3

UR - https://doi.org/10.1016/j.matpr.2020.02.317

U2 - 10.1016/j.matpr.2020.02.317

DO - 10.1016/j.matpr.2020.02.317

M3 - Article

SN - 2214-7853

JO - Materials Today: Proceedings

JF - Materials Today: Proceedings

ER -