Acoustofluidic Behaviors of Zno/Al Plate/Sheet Acoustic Wave Devices Using Hybrid Modes

Yong Wang, Qian Zhang, Ran Tao, Dangsheng Li, Yongqing Fu, Jin Xie

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

In this paper, we report acoustofluidic behaviors of zinc oxide (ZnO) thin film surface acoustic wave (SAW) devices fabricated on aluminum (Al) plate/sheet (600m/200m) substrates using hybrid modes. Finite element analysis (FEA) ulation and experimental results indicate that the wave vibration modes are changed from Rayleigh mode to hybrid modes and subsequently to Lamb wave modes with the increased device's wavelength or decreased substrate thickness. For the Rayleigh, hybrid and zero-order Lamb wave modes, the droplet movement is a combination of rolling and sliding, whereas for Sezawa mode and one-order Lamb wave modes, the droplet movement is a combination of jumping and sliding. Moreover, for Lamb wave modes, the asymmetrical modes present a better pumping performance than those of symmetrical modes.

Original languageEnglish
Title of host publication2022 IEEE 35th International Conference on Micro Electro Mechanical Systems (MEMS 2022)
Place of PublicationPiscataway, US
PublisherIEEE
Pages904-907
Number of pages4
Volume2
ISBN (Electronic)9781665409117
ISBN (Print)9781665409124
DOIs
Publication statusPublished - 9 Jan 2022
Event35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022 - Tokyo, Japan
Duration: 9 Jan 202213 Jan 2022

Publication series

NameIEEE Symposium on Mass Storage Systems and Technologies
PublisherIEEE
Volume2
ISSN (Print)1084-6999
ISSN (Electronic)2160-1968

Conference

Conference35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022
Country/TerritoryJapan
CityTokyo
Period9/01/2213/01/22

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