TY - GEN
T1 - Acoustofluidic Behaviors of Zno/Al Plate/Sheet Acoustic Wave Devices Using Hybrid Modes
AU - Wang, Yong
AU - Zhang, Qian
AU - Tao, Ran
AU - Li, Dangsheng
AU - Fu, Yongqing
AU - Xie, Jin
N1 - Funding Information: This work is supported by the National Natural Science Foundation of China under Grant No. 51875521, the Zhejiang Provincial Natural Science Foundation of China under Grant No. LZ19E050002, the Engineering Physics and Science Research Council of UK (EPSRC EP/P018998/1) and UK Fluidic Network (EP/N032861/1) Special Interest Group of Acoustofluidics, International Exchange Grant (IEC/NSFC/201078) through the Royal Society, and the National NSFC.
PY - 2022/1/9
Y1 - 2022/1/9
N2 - In this paper, we report acoustofluidic behaviors of zinc oxide (ZnO) thin film surface acoustic wave (SAW) devices fabricated on aluminum (Al) plate/sheet (600m/200m) substrates using hybrid modes. Finite element analysis (FEA) ulation and experimental results indicate that the wave vibration modes are changed from Rayleigh mode to hybrid modes and subsequently to Lamb wave modes with the increased device's wavelength or decreased substrate thickness. For the Rayleigh, hybrid and zero-order Lamb wave modes, the droplet movement is a combination of rolling and sliding, whereas for Sezawa mode and one-order Lamb wave modes, the droplet movement is a combination of jumping and sliding. Moreover, for Lamb wave modes, the asymmetrical modes present a better pumping performance than those of symmetrical modes.
AB - In this paper, we report acoustofluidic behaviors of zinc oxide (ZnO) thin film surface acoustic wave (SAW) devices fabricated on aluminum (Al) plate/sheet (600m/200m) substrates using hybrid modes. Finite element analysis (FEA) ulation and experimental results indicate that the wave vibration modes are changed from Rayleigh mode to hybrid modes and subsequently to Lamb wave modes with the increased device's wavelength or decreased substrate thickness. For the Rayleigh, hybrid and zero-order Lamb wave modes, the droplet movement is a combination of rolling and sliding, whereas for Sezawa mode and one-order Lamb wave modes, the droplet movement is a combination of jumping and sliding. Moreover, for Lamb wave modes, the asymmetrical modes present a better pumping performance than those of symmetrical modes.
KW - Acoustofluidics
KW - Al plate/sheet
KW - hybrid modes
KW - SAW
KW - ZnO thin film
UR - http://www.scopus.com/inward/record.url?scp=85126391954&partnerID=8YFLogxK
U2 - 10.1109/mems51670.2022.9699824
DO - 10.1109/mems51670.2022.9699824
M3 - Conference contribution
AN - SCOPUS:85126391954
SN - 9781665409124
VL - 2
T3 - IEEE Symposium on Mass Storage Systems and Technologies
SP - 904
EP - 907
BT - 2022 IEEE 35th International Conference on Micro Electro Mechanical Systems (MEMS 2022)
PB - IEEE
CY - Piscataway, US
T2 - 35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022
Y2 - 9 January 2022 through 13 January 2022
ER -