Acoustofluidic Behaviors of Zno/Al Plate/Sheet Acoustic Wave Devices Using Hybrid Modes

Yong Wang; Qian Zhang; Ran Tao; Dangsheng Li; Yongqing Fu; Jin Xie

doi:10.1109/mems51670.2022.9699824

Acoustofluidic Behaviors of Zno/Al Plate/Sheet Acoustic Wave Devices Using Hybrid Modes

Yong Wang, Qian Zhang, Ran Tao, Dangsheng Li, Yongqing Fu, Jin Xie

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

2 Citations (Scopus)

25 Downloads (Pure)

Abstract

In this paper, we report acoustofluidic behaviors of zinc oxide (ZnO) thin film surface acoustic wave (SAW) devices fabricated on aluminum (Al) plate/sheet (600m/200m) substrates using hybrid modes. Finite element analysis (FEA) ulation and experimental results indicate that the wave vibration modes are changed from Rayleigh mode to hybrid modes and subsequently to Lamb wave modes with the increased device's wavelength or decreased substrate thickness. For the Rayleigh, hybrid and zero-order Lamb wave modes, the droplet movement is a combination of rolling and sliding, whereas for Sezawa mode and one-order Lamb wave modes, the droplet movement is a combination of jumping and sliding. Moreover, for Lamb wave modes, the asymmetrical modes present a better pumping performance than those of symmetrical modes.

Original language	English
Title of host publication	2022 IEEE 35th International Conference on Micro Electro Mechanical Systems (MEMS 2022)
Place of Publication	Piscataway, US
Publisher	IEEE
Pages	904-907
Number of pages	4
Volume	2
ISBN (Electronic)	9781665409117
ISBN (Print)	9781665409124
DOIs	https://doi.org/10.1109/mems51670.2022.9699824
Publication status	Published - 9 Jan 2022
Event	35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022 - Tokyo, Japan Duration: 9 Jan 2022 → 13 Jan 2022

Publication series

Name	IEEE Symposium on Mass Storage Systems and Technologies
Publisher	IEEE
Volume	2
ISSN (Print)	1084-6999
ISSN (Electronic)	2160-1968

Conference

Conference	35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022
Country/Territory	Japan
City	Tokyo
Period	9/01/22 → 13/01/22

Keywords

Acoustofluidics
Al plate/sheet
hybrid modes
SAW
ZnO thin film

Access to Document

10.1109/mems51670.2022.9699824

MEMS 2022-ACOUSTOFLUIDIC BEHAVIORS OF ZNOAL PLATESHEET ACOUSTIC WAVE DEVICES USING HYBRID MODESAccepted author manuscript, 591 KB

Cite this

Wang, Y., Zhang, Q., Tao, R., Li, D., Fu, Y., & Xie, J. (2022). Acoustofluidic Behaviors of Zno/Al Plate/Sheet Acoustic Wave Devices Using Hybrid Modes. In 2022 IEEE 35th International Conference on Micro Electro Mechanical Systems (MEMS 2022) (Vol. 2, pp. 904-907). (IEEE Symposium on Mass Storage Systems and Technologies; Vol. 2). IEEE. https://doi.org/10.1109/mems51670.2022.9699824

@inproceedings{51c2bef7060b4354b12e3dcea328368f,

title = "Acoustofluidic Behaviors of Zno/Al Plate/Sheet Acoustic Wave Devices Using Hybrid Modes",

abstract = "In this paper, we report acoustofluidic behaviors of zinc oxide (ZnO) thin film surface acoustic wave (SAW) devices fabricated on aluminum (Al) plate/sheet (600m/200m) substrates using hybrid modes. Finite element analysis (FEA) ulation and experimental results indicate that the wave vibration modes are changed from Rayleigh mode to hybrid modes and subsequently to Lamb wave modes with the increased device's wavelength or decreased substrate thickness. For the Rayleigh, hybrid and zero-order Lamb wave modes, the droplet movement is a combination of rolling and sliding, whereas for Sezawa mode and one-order Lamb wave modes, the droplet movement is a combination of jumping and sliding. Moreover, for Lamb wave modes, the asymmetrical modes present a better pumping performance than those of symmetrical modes. ",

keywords = "Acoustofluidics, Al plate/sheet, hybrid modes, SAW, ZnO thin film",

author = "Yong Wang and Qian Zhang and Ran Tao and Dangsheng Li and Yongqing Fu and Jin Xie",

note = "Funding Information: This work is supported by the National Natural Science Foundation of China under Grant No. 51875521, the Zhejiang Provincial Natural Science Foundation of China under Grant No. LZ19E050002, the Engineering Physics and Science Research Council of UK (EPSRC EP/P018998/1) and UK Fluidic Network (EP/N032861/1) Special Interest Group of Acoustofluidics, International Exchange Grant (IEC/NSFC/201078) through the Royal Society, and the National NSFC.; 35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022 ; Conference date: 09-01-2022 Through 13-01-2022",

year = "2022",

month = jan,

day = "9",

doi = "10.1109/mems51670.2022.9699824",

language = "English",

isbn = "9781665409124",

volume = "2",

series = "IEEE Symposium on Mass Storage Systems and Technologies",

publisher = "IEEE",

pages = "904--907",

booktitle = "2022 IEEE 35th International Conference on Micro Electro Mechanical Systems (MEMS 2022)",

address = "United States",

}

Wang, Y, Zhang, Q, Tao, R, Li, D, Fu, Y & Xie, J 2022, Acoustofluidic Behaviors of Zno/Al Plate/Sheet Acoustic Wave Devices Using Hybrid Modes. in 2022 IEEE 35th International Conference on Micro Electro Mechanical Systems (MEMS 2022). vol. 2, IEEE Symposium on Mass Storage Systems and Technologies, vol. 2, IEEE, Piscataway, US, pp. 904-907, 35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022, Tokyo, Japan, 9/01/22. https://doi.org/10.1109/mems51670.2022.9699824

Acoustofluidic Behaviors of Zno/Al Plate/Sheet Acoustic Wave Devices Using Hybrid Modes. / Wang, Yong; Zhang, Qian; Tao, Ran et al.
2022 IEEE 35th International Conference on Micro Electro Mechanical Systems (MEMS 2022). Vol. 2 Piscataway, US: IEEE, 2022. p. 904-907 (IEEE Symposium on Mass Storage Systems and Technologies; Vol. 2).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Acoustofluidic Behaviors of Zno/Al Plate/Sheet Acoustic Wave Devices Using Hybrid Modes

AU - Wang, Yong

AU - Zhang, Qian

AU - Tao, Ran

AU - Li, Dangsheng

AU - Fu, Yongqing

AU - Xie, Jin

N1 - Funding Information: This work is supported by the National Natural Science Foundation of China under Grant No. 51875521, the Zhejiang Provincial Natural Science Foundation of China under Grant No. LZ19E050002, the Engineering Physics and Science Research Council of UK (EPSRC EP/P018998/1) and UK Fluidic Network (EP/N032861/1) Special Interest Group of Acoustofluidics, International Exchange Grant (IEC/NSFC/201078) through the Royal Society, and the National NSFC.

PY - 2022/1/9

Y1 - 2022/1/9

N2 - In this paper, we report acoustofluidic behaviors of zinc oxide (ZnO) thin film surface acoustic wave (SAW) devices fabricated on aluminum (Al) plate/sheet (600m/200m) substrates using hybrid modes. Finite element analysis (FEA) ulation and experimental results indicate that the wave vibration modes are changed from Rayleigh mode to hybrid modes and subsequently to Lamb wave modes with the increased device's wavelength or decreased substrate thickness. For the Rayleigh, hybrid and zero-order Lamb wave modes, the droplet movement is a combination of rolling and sliding, whereas for Sezawa mode and one-order Lamb wave modes, the droplet movement is a combination of jumping and sliding. Moreover, for Lamb wave modes, the asymmetrical modes present a better pumping performance than those of symmetrical modes.

AB - In this paper, we report acoustofluidic behaviors of zinc oxide (ZnO) thin film surface acoustic wave (SAW) devices fabricated on aluminum (Al) plate/sheet (600m/200m) substrates using hybrid modes. Finite element analysis (FEA) ulation and experimental results indicate that the wave vibration modes are changed from Rayleigh mode to hybrid modes and subsequently to Lamb wave modes with the increased device's wavelength or decreased substrate thickness. For the Rayleigh, hybrid and zero-order Lamb wave modes, the droplet movement is a combination of rolling and sliding, whereas for Sezawa mode and one-order Lamb wave modes, the droplet movement is a combination of jumping and sliding. Moreover, for Lamb wave modes, the asymmetrical modes present a better pumping performance than those of symmetrical modes.

KW - Acoustofluidics

KW - Al plate/sheet

KW - hybrid modes

KW - SAW

KW - ZnO thin film

UR - https://www.scopus.com/pages/publications/85126391954

U2 - 10.1109/mems51670.2022.9699824

DO - 10.1109/mems51670.2022.9699824

M3 - Conference contribution

AN - SCOPUS:85126391954

SN - 9781665409124

VL - 2

T3 - IEEE Symposium on Mass Storage Systems and Technologies

SP - 904

EP - 907

BT - 2022 IEEE 35th International Conference on Micro Electro Mechanical Systems (MEMS 2022)

PB - IEEE

CY - Piscataway, US

T2 - 35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022

Y2 - 9 January 2022 through 13 January 2022

ER -

Acoustofluidic Behaviors of Zno/Al Plate/Sheet Acoustic Wave Devices Using Hybrid Modes

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