Advances in piezoelectric thin films for acoustic biosensors, acoustofluidics and lab-on-chip applications

Y. Q. Fu*, J. K. Luo, N. T. Nguyen, A. J. Walton, A. J. Flewitt, Xiao-Tao Zu, Y. Li, Glen McHale, A. Matthews, Enrique Iborra, Hejun Du, W. I. Milne

*Corresponding author for this work

Research output: Contribution to journalReview articlepeer-review

215 Citations (Scopus)

Abstract

Recently, piezoelectric thin films including zinc oxide (ZnO) and aluminium nitride (AlN) have found a broad range of lab-on-chip applications such as biosensing, particle/cell concentrating, sorting/patterning, pumping, mixing, nebulisation and jetting. Integrated acoustic wave sensing/microfluidic devices have been fabricated by depositing these piezoelectric films onto a number of substrates such as silicon, ceramics, diamond, quartz, glass, and more recently also polymer, metallic foils and bendable glass/silicon for making flexible devices. Such thin film acoustic wave devices have great potential for implementing integrated, disposable, or bendable/flexible lab-on-a-chip devices into various sensing and actuating applications. This paper discusses the recent development in engineering high performance piezoelectric thin films, and highlights the critical issues such as film deposition, MEMS processing techniques, control of deposition/processing parametres, film texture, doping, dispersion effects, film stress, multilayer design, electrode materials/designs and substrate selections. Finally, advances in using thin film devices for lab-on-chip applications are summarised and future development trends are identified.

Original languageEnglish
Pages (from-to)31-91
Number of pages61
JournalProgress in Materials Science
Volume89
Early online date24 Apr 2017
DOIs
Publication statusPublished - 1 Aug 2017

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