AlScN thin film based surface acoustic wave devices with enhanced microfluidic performance

Wenbo Wang, Yong Qing Fu, Jinju Chen, Weipeng Xuan, Jinkai Chen, Paul Mayrhofer, Pengfei Duan, Elmar Bittner, Jikui Luo

Research output: Contribution to journalArticlepeer-review

31 Citations (Scopus)
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