Aluminium nitride thin film acoustic wave device for microfluidic and biosensing applications

Yong Qing Fu, Jyh-Shiarn Cherng, Jikui Luo, Marc Desmulliez, Yifan Li, Anthony Walton, Frank Placido

Research output: Chapter in Book/Report/Conference proceedingChapterpeer-review

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Original languageEnglish
Title of host publicationAcoustic Waves
EditorsDon Dissanayake
Place of PublicationRijeka
ISBN (Print)9789533071114
Publication statusPublished - 28 Sept 2010

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