Annealing effect on structural, functional and device properties of flexible ZnO acoustic wave sensors based on commercial available Al foil

Yong Liu; Jing Ting Luo; Chao Zhao; Jian Zhou; Sameer Hassan; Yifan Li; Michael Cooke; Qiang Wu; Wai Pang Ng; Jiang Feng Du; Yang Liu; Yong Qing Fu

doi:10.1109/TED.2016.2610466

Annealing effect on structural, functional and device properties of flexible ZnO acoustic wave sensors based on commercial available Al foil

Yong Liu, Jing Ting Luo, Chao Zhao, Jian Zhou, Sameer Hassan, Yifan Li, Michael Cooke, Qiang Wu, Wai Pang Ng, Jiang Feng Du, Yang Liu, Yong Qing Fu

Research output: Contribution to journal › Article › peer-review

16 Citations (Scopus)

31 Downloads (Pure)

Abstract

This paper reports post-annealing of zinc oxide (ZnO) films on flexible foil substrates in order to improve the functional and acoustic wave sensing performance. ZnO films of 5 m thick were deposited onto aluminum foils (50 μm thick) using magnetron sputtering and then annealed in air at different temperatures between 300 and 500oC. Effects of post-annealing on structural, optical and device properties of the ZnO films and ZnO/Al foil acoustic wave devices were investigated. A temperature of 350oC was identified as the optimized annealing temperature, which resulted in good light transmission, improved crystallinity, reduced film stress/defects, and increased amplitude of reflection signals of both Lamb and Rayleigh waves. The annealed ZnO/Al acoustic wave devices demonstrated a large temperature coefficient of frequency and a good linearity, revealing the potential for precision temperature sensing.

Original language	English
Pages (from-to)	4535-4541
Journal	IEEE Transactions on Electron Devices
Volume	63
Issue number	11
DOIs	https://doi.org/10.1109/TED.2016.2610466
Publication status	Published - 11 Oct 2016

Access to Document

10.1109/TED.2016.2610466

Manuscript for TED by yong 0907Accepted author manuscript, 3.18 MB
Manuscript for TED by yong 0907Accepted author manuscript, 1.26 MB

Cite this

Liu, Y., Luo, J. T., Zhao, C., Zhou, J., Hassan, S., Li, Y., Cooke, M., Wu, Q., Ng, W. P., Du, J. F., Liu, Y., & Fu, Y. Q. (2016). Annealing effect on structural, functional and device properties of flexible ZnO acoustic wave sensors based on commercial available Al foil. IEEE Transactions on Electron Devices, 63(11), 4535-4541. https://doi.org/10.1109/TED.2016.2610466

@article{e9a9d877b8b94ad1ab0f51ae0b72c867,

title = "Annealing effect on structural, functional and device properties of flexible ZnO acoustic wave sensors based on commercial available Al foil",

abstract = "This paper reports post-annealing of zinc oxide (ZnO) films on flexible foil substrates in order to improve the functional and acoustic wave sensing performance. ZnO films of 5 m thick were deposited onto aluminum foils (50 μm thick) using magnetron sputtering and then annealed in air at different temperatures between 300 and 500oC. Effects of post-annealing on structural, optical and device properties of the ZnO films and ZnO/Al foil acoustic wave devices were investigated. A temperature of 350oC was identified as the optimized annealing temperature, which resulted in good light transmission, improved crystallinity, reduced film stress/defects, and increased amplitude of reflection signals of both Lamb and Rayleigh waves. The annealed ZnO/Al acoustic wave devices demonstrated a large temperature coefficient of frequency and a good linearity, revealing the potential for precision temperature sensing.",

author = "Yong Liu and Luo, {Jing Ting} and Chao Zhao and Jian Zhou and Sameer Hassan and Yifan Li and Michael Cooke and Qiang Wu and Ng, {Wai Pang} and Du, {Jiang Feng} and Yang Liu and Fu, {Yong Qing}",

note = "{\textcopyright} 2016 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works",

year = "2016",

month = oct,

day = "11",

doi = "10.1109/TED.2016.2610466",

language = "English",

volume = "63",

pages = "4535--4541",

journal = "IEEE Transactions on Electron Devices",

issn = "0018-9383",

publisher = "IEEE",

number = "11",

}

TY - JOUR

T1 - Annealing effect on structural, functional and device properties of flexible ZnO acoustic wave sensors based on commercial available Al foil

AU - Liu, Yong

AU - Luo, Jing Ting

AU - Zhao, Chao

AU - Zhou, Jian

AU - Hassan, Sameer

AU - Li, Yifan

AU - Cooke, Michael

AU - Wu, Qiang

AU - Ng, Wai Pang

AU - Du, Jiang Feng

AU - Liu, Yang

AU - Fu, Yong Qing

N1 - © 2016 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works

PY - 2016/10/11

Y1 - 2016/10/11

N2 - This paper reports post-annealing of zinc oxide (ZnO) films on flexible foil substrates in order to improve the functional and acoustic wave sensing performance. ZnO films of 5 m thick were deposited onto aluminum foils (50 μm thick) using magnetron sputtering and then annealed in air at different temperatures between 300 and 500oC. Effects of post-annealing on structural, optical and device properties of the ZnO films and ZnO/Al foil acoustic wave devices were investigated. A temperature of 350oC was identified as the optimized annealing temperature, which resulted in good light transmission, improved crystallinity, reduced film stress/defects, and increased amplitude of reflection signals of both Lamb and Rayleigh waves. The annealed ZnO/Al acoustic wave devices demonstrated a large temperature coefficient of frequency and a good linearity, revealing the potential for precision temperature sensing.

AB - This paper reports post-annealing of zinc oxide (ZnO) films on flexible foil substrates in order to improve the functional and acoustic wave sensing performance. ZnO films of 5 m thick were deposited onto aluminum foils (50 μm thick) using magnetron sputtering and then annealed in air at different temperatures between 300 and 500oC. Effects of post-annealing on structural, optical and device properties of the ZnO films and ZnO/Al foil acoustic wave devices were investigated. A temperature of 350oC was identified as the optimized annealing temperature, which resulted in good light transmission, improved crystallinity, reduced film stress/defects, and increased amplitude of reflection signals of both Lamb and Rayleigh waves. The annealed ZnO/Al acoustic wave devices demonstrated a large temperature coefficient of frequency and a good linearity, revealing the potential for precision temperature sensing.

U2 - 10.1109/TED.2016.2610466

DO - 10.1109/TED.2016.2610466

M3 - Article

SN - 0018-9383

VL - 63

SP - 4535

EP - 4541

JO - IEEE Transactions on Electron Devices

JF - IEEE Transactions on Electron Devices

IS - 11

ER -

Annealing effect on structural, functional and device properties of flexible ZnO acoustic wave sensors based on commercial available Al foil

Abstract

Access to Document

Fingerprint

Cite this