Annealing effect on structural, functional and device properties of flexible ZnO acoustic wave sensors based on commercial available Al foil

Yong Liu, Jing Ting Luo, Chao Zhao, Jian Zhou, Sameer Hassan, Yifan Li, Michael Cooke, Qiang Wu, Wai Pang Ng, Jiang Feng Du, Yang Liu, Yong Qing Fu

Research output: Contribution to journalArticlepeer-review

10 Citations (Scopus)
8 Downloads (Pure)

Abstract

This paper reports post-annealing of zinc oxide (ZnO) films on flexible foil substrates in order to improve the functional and acoustic wave sensing performance. ZnO films of 5 m thick were deposited onto aluminum foils (50 μm thick) using magnetron sputtering and then annealed in air at different temperatures between 300 and 500oC. Effects of post-annealing on structural, optical and device properties of the ZnO films and ZnO/Al foil acoustic wave devices were investigated. A temperature of 350oC was identified as the optimized annealing temperature, which resulted in good light transmission, improved crystallinity, reduced film stress/defects, and increased amplitude of reflection signals of both Lamb and Rayleigh waves. The annealed ZnO/Al acoustic wave devices demonstrated a large temperature coefficient of frequency and a good linearity, revealing the potential for precision temperature sensing.
Original languageEnglish
Pages (from-to)4535-4541
JournalIEEE Transactions on Electron Devices
Volume63
Issue number11
DOIs
Publication statusPublished - 11 Oct 2016

Fingerprint

Dive into the research topics of 'Annealing effect on structural, functional and device properties of flexible ZnO acoustic wave sensors based on commercial available Al foil'. Together they form a unique fingerprint.

Cite this