TY - JOUR
T1 - Annealing effect on structural, functional and device properties of flexible ZnO acoustic wave sensors based on commercial available Al foil
AU - Liu, Yong
AU - Luo, Jing Ting
AU - Zhao, Chao
AU - Zhou, Jian
AU - Hassan, Sameer
AU - Li, Yifan
AU - Cooke, Michael
AU - Wu, Qiang
AU - Ng, Wai Pang
AU - Du, Jiang Feng
AU - Liu, Yang
AU - Fu, Yong Qing
N1 - © 2016 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works
PY - 2016/10/11
Y1 - 2016/10/11
N2 - This paper reports post-annealing of zinc oxide (ZnO) films on flexible foil substrates in order to improve the functional and acoustic wave sensing performance. ZnO films of 5 m thick were deposited onto aluminum foils (50 μm thick) using magnetron sputtering and then annealed in air at different temperatures between 300 and 500oC. Effects of post-annealing on structural, optical and device properties of the ZnO films and ZnO/Al foil acoustic wave devices were investigated. A temperature of 350oC was identified as the optimized annealing temperature, which resulted in good light transmission, improved crystallinity, reduced film stress/defects, and increased amplitude of reflection signals of both Lamb and Rayleigh waves. The annealed ZnO/Al acoustic wave devices demonstrated a large temperature coefficient of frequency and a good linearity, revealing the potential for precision temperature sensing.
AB - This paper reports post-annealing of zinc oxide (ZnO) films on flexible foil substrates in order to improve the functional and acoustic wave sensing performance. ZnO films of 5 m thick were deposited onto aluminum foils (50 μm thick) using magnetron sputtering and then annealed in air at different temperatures between 300 and 500oC. Effects of post-annealing on structural, optical and device properties of the ZnO films and ZnO/Al foil acoustic wave devices were investigated. A temperature of 350oC was identified as the optimized annealing temperature, which resulted in good light transmission, improved crystallinity, reduced film stress/defects, and increased amplitude of reflection signals of both Lamb and Rayleigh waves. The annealed ZnO/Al acoustic wave devices demonstrated a large temperature coefficient of frequency and a good linearity, revealing the potential for precision temperature sensing.
UR - https://www.scopus.com/pages/publications/84991096597
U2 - 10.1109/TED.2016.2610466
DO - 10.1109/TED.2016.2610466
M3 - Article
SN - 0018-9383
VL - 63
SP - 4535
EP - 4541
JO - IEEE Transactions on Electron Devices
JF - IEEE Transactions on Electron Devices
IS - 11
ER -