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Anodic Ta2O5 for CMOS compatible low voltage electrowetting-on-dielectric device fabrication
Yifan Li, William Parkes, Les Haworth, Adam Stokes, K. Muir, P. Li, A. Collin, N. Hutcheon, Robert Henderson, Bruce Rae
Research output: Contribution to journal › Article › peer-review
51
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(Scopus)