This paper reports on the development of micromachined pillar arrays for the filtering of terahertz radiation. These pillar arrays are fabricated using ultraviolet based processing of thick SU8. This micromachining technique enables the array patterns, dimensions, and consequently the filter characteristics, to be readily defined. In particular, we demonstrate that by combining individual filter arrays with either different periods or pillar diameters we can isolate individual pass bands in the 1 to 2 THz region.
|Title of host publication||Terahertz and gigahertz electronics and photonics VI |
|Editors||Kurt J. Linden, Laurence P. Sadwick|
|Place of Publication||Bellingham, WA|
|Publication status||Published - 1 Feb 2007|
|Name||Proceedings of the SPIE|