BCB film based SAW humidity sensor

Y. Liu, Changhai Wang, Yifan Li

Research output: Contribution to journalArticlepeer-review

5 Citations (Scopus)

Abstract

Novel benzocyclobutene (BCB) film based surface acoustic wave (SAW) humidity sensors were successfully designed and fabricated. A sensitivity of 0.26 dB/RH was successfully demonstrated between 8.6 and 90.6 relative humidity (RH), with a linear relationship between RH level and resonance amplitude. The temperature stability of resonance frequency and amplitude has also been studied.
Original languageEnglish
Pages (from-to)1012-1014
JournalElectronics Letters
Volume47
Issue number18
DOIs
Publication statusPublished - 2011

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