Bending behaviors of flexible acoustic wave devices under non-uniform elasto-plastic deformation

Qian Zhang, Yong Wang, Dongsheng Li, Xin Yang, Jin Xie*, Richard Fu*

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

1 Citation (Scopus)
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Abstract

Flexible acoustic wave devices (FAWDs) have been explored for various applications where bending is inevitable. However, theoretical investigations of bending behavior of FAWDs hitherto are mostly done in the linear deformation regime. Herein, we develop a multi-sublayer model based on a stiffness matrix method for analysis of frequency shifts of surface acoustic wave (SAW) and Lamb waves under elasto-plastic deformations. Using this model, we calculate the frequency shifts for the cases of both an elastic bending and an elasto-plastic bending. Experimental frequency shifts of ZnO/Al flexible devices show good agreements with the theoretical results in the elastic bending tests (with a relative error of strain sensitivity < 3%), and also show relatively good agreements with the qualitative theoretical predictions in the nonlinearly elasto plastic bending tests. For three successive bending and recovery processes, the experimentally obtained frequency shifts show good repeatability in the elastic and elasto-plastic bending stages, demonstrating maximum relative errors of strain sensitivities less than 6.1% and 18.2%.
Original languageEnglish
Article number121601
Number of pages611
JournalApplied Physics Letters
Volume118
Issue number12
Early online date22 Mar 2021
DOIs
Publication statusPublished - 22 Mar 2021

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