Characterization and humidity sensing of ZnO/42° YX LiTaO3 Love wave devices with ZnO nanorods

Yuanjun Guo; Jia Zhang; Chao Zhao; Jin-Yi Ma; Hua-Feng Pang; Ping An Hu; Frank Placido; Desmond Gibson; Xiao-Tao Zu; H. Y. Zu; Yong Qing Fu

doi:10.1016/j.materresbull.2013.04.072

Characterization and humidity sensing of ZnO/42° YX LiTaO3 Love wave devices with ZnO nanorods

Yuanjun Guo, Jia Zhang, Chao Zhao, Jin-Yi Ma, Hua-Feng Pang, Ping An Hu, Frank Placido, Desmond Gibson, Xiao-Tao Zu, H. Y. Zu, Yong Qing Fu

Research output: Contribution to journal › Article › peer-review

16 Citations (Scopus)

Abstract

Love mode surface acoustic wave devices based on ZnO/42° YX LiTaO3 were characterized with the thickness of the sputtered ZnO guiding layer varied from 250 nm to 1.18 μm. Phase velocity, temperature coefficient of resonant frequency, sensitivity, electromechanical coupling coefficient and humidity sensing of the Love mode SAW devices were studied as a function of the ZnO layer thickness. With increasing ZnO thickness over the range of thickness values we have examined, the sensitivity of 42° YX LiTaO3 to liquid loading increased and the values of electromechanical coupling coefficient decreased. The device with a thickness of 250 nm showed the best humidity response. ZnO nanorods were grown on this device and its humidity sensing performance has been further improved due to their large surface-to-volume ratio of the ZnO nanorods.

Original language	English
Pages (from-to)	5058-5063
Journal	Materials Research Bulletin
Volume	48
Issue number	12
DOIs	https://doi.org/10.1016/j.materresbull.2013.04.072
Publication status	Published - Dec 2013

Keywords

Thin films
nanostructures
X-ray diffraction
electron microscopy
surface properties

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10.1016/j.materresbull.2013.04.072

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@article{c16f09d57670407cab99ca78f5da9a67,

title = "Characterization and humidity sensing of ZnO/42° YX LiTaO3 Love wave devices with ZnO nanorods",

abstract = "Love mode surface acoustic wave devices based on ZnO/42° YX LiTaO3 were characterized with the thickness of the sputtered ZnO guiding layer varied from 250 nm to 1.18 μm. Phase velocity, temperature coefficient of resonant frequency, sensitivity, electromechanical coupling coefficient and humidity sensing of the Love mode SAW devices were studied as a function of the ZnO layer thickness. With increasing ZnO thickness over the range of thickness values we have examined, the sensitivity of 42° YX LiTaO3 to liquid loading increased and the values of electromechanical coupling coefficient decreased. The device with a thickness of 250 nm showed the best humidity response. ZnO nanorods were grown on this device and its humidity sensing performance has been further improved due to their large surface-to-volume ratio of the ZnO nanorods.",

keywords = "Thin films, nanostructures, X-ray diffraction, electron microscopy, surface properties",

author = "Yuanjun Guo and Jia Zhang and Chao Zhao and Jin-Yi Ma and Hua-Feng Pang and Hu, {Ping An} and Frank Placido and Desmond Gibson and Xiao-Tao Zu and Zu, {H. Y.} and Fu, {Yong Qing}",

year = "2013",

month = dec,

doi = "10.1016/j.materresbull.2013.04.072",

language = "English",

volume = "48",

pages = "5058--5063",

journal = "Materials Research Bulletin",

issn = "0025-5408",

publisher = "Elsevier",

number = "12",

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TY - JOUR

T1 - Characterization and humidity sensing of ZnO/42° YX LiTaO3 Love wave devices with ZnO nanorods

AU - Guo, Yuanjun

AU - Zhang, Jia

AU - Zhao, Chao

AU - Ma, Jin-Yi

AU - Pang, Hua-Feng

AU - Hu, Ping An

AU - Placido, Frank

AU - Gibson, Desmond

AU - Zu, Xiao-Tao

AU - Zu, H. Y.

AU - Fu, Yong Qing

PY - 2013/12

Y1 - 2013/12

N2 - Love mode surface acoustic wave devices based on ZnO/42° YX LiTaO3 were characterized with the thickness of the sputtered ZnO guiding layer varied from 250 nm to 1.18 μm. Phase velocity, temperature coefficient of resonant frequency, sensitivity, electromechanical coupling coefficient and humidity sensing of the Love mode SAW devices were studied as a function of the ZnO layer thickness. With increasing ZnO thickness over the range of thickness values we have examined, the sensitivity of 42° YX LiTaO3 to liquid loading increased and the values of electromechanical coupling coefficient decreased. The device with a thickness of 250 nm showed the best humidity response. ZnO nanorods were grown on this device and its humidity sensing performance has been further improved due to their large surface-to-volume ratio of the ZnO nanorods.

AB - Love mode surface acoustic wave devices based on ZnO/42° YX LiTaO3 were characterized with the thickness of the sputtered ZnO guiding layer varied from 250 nm to 1.18 μm. Phase velocity, temperature coefficient of resonant frequency, sensitivity, electromechanical coupling coefficient and humidity sensing of the Love mode SAW devices were studied as a function of the ZnO layer thickness. With increasing ZnO thickness over the range of thickness values we have examined, the sensitivity of 42° YX LiTaO3 to liquid loading increased and the values of electromechanical coupling coefficient decreased. The device with a thickness of 250 nm showed the best humidity response. ZnO nanorods were grown on this device and its humidity sensing performance has been further improved due to their large surface-to-volume ratio of the ZnO nanorods.

KW - Thin films

KW - nanostructures

KW - X-ray diffraction

KW - electron microscopy

KW - surface properties

U2 - 10.1016/j.materresbull.2013.04.072

DO - 10.1016/j.materresbull.2013.04.072

M3 - Article

SN - 0025-5408

VL - 48

SP - 5058

EP - 5063

JO - Materials Research Bulletin

JF - Materials Research Bulletin

IS - 12

ER -

Characterization and humidity sensing of ZnO/42° YX LiTaO3 Love wave devices with ZnO nanorods

Abstract

Keywords

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