Characterization of the surface acoustic wave devices based on ZnO/nanocrystalline diamond structures

Hua-Feng Pang; Luis Garcia-Gancedo; Yong Qing Fu; Samuele Porro; Yan-Wei Gu; Jikui Luo; Xiao-Tao Zu; Frank Placido; John I. Wilson; Andrew Flewitt; William Milne

doi:10.1002/pssa.201228631

Characterization of the surface acoustic wave devices based on ZnO/nanocrystalline diamond structures

Hua-Feng Pang, Luis Garcia-Gancedo, Yong Qing Fu, Samuele Porro, Yan-Wei Gu, Jikui Luo, Xiao-Tao Zu, Frank Placido, John I. Wilson, Andrew Flewitt, William Milne

Research output: Contribution to journal › Article › peer-review

17 Citations (Scopus)

Abstract

Nanocrystalline ZnO films with strong (0002) texture and fine grains were deposited onto ultra-nanocrystalline diamond (UNCD) layers on silicon using high target utilization sputtering technology. The unique characteristic of this sputtering technique allows room temperature growth of smooth ZnO films with a low roughness and low stress at high growth rates. Surface acoustic wave (SAW) devices were fabricated on ZnO/UNCD structure and exhibited good transmission signals with a low insertion loss and a strong side-lobe suppression for the Rayleigh mode SAW. Based on the optimization of the layered structure of the SAW device, a good performance with a coupling coefficient of 5.2% has been realized, promising for improving the microfluidic efficiency in droplet transportation comparing with that of the ZnO/Si SAW device. An optimized temperature coefficient of frequency of −23.4 ppm °C−1 was obtained for the SAW devices with the 2.72 µm-thick ZnO and 1.1 µm-thick UNCD film. Significant thermal effect due to the acoustic heating has been redcued which is related to the temperature stability of the ZnO/UNCD SAW device.

Original language	English
Pages (from-to)	1575-1583
Journal	physica status solidi (a)
Volume	210
Issue number	8
DOIs	https://doi.org/10.1002/pssa.201228631
Publication status	Published - Aug 2013

Keywords

diamond
nanocrystalline materials
sputtering
surface acoustic waves
thin films
ZnO

Access to Document

10.1002/pssa.201228631

Cite this

@article{c8729d285b3b4c8abe42bba195ed86ca,

title = "Characterization of the surface acoustic wave devices based on ZnO/nanocrystalline diamond structures",

abstract = "Nanocrystalline ZnO films with strong (0002) texture and fine grains were deposited onto ultra-nanocrystalline diamond (UNCD) layers on silicon using high target utilization sputtering technology. The unique characteristic of this sputtering technique allows room temperature growth of smooth ZnO films with a low roughness and low stress at high growth rates. Surface acoustic wave (SAW) devices were fabricated on ZnO/UNCD structure and exhibited good transmission signals with a low insertion loss and a strong side-lobe suppression for the Rayleigh mode SAW. Based on the optimization of the layered structure of the SAW device, a good performance with a coupling coefficient of 5.2\% has been realized, promising for improving the microfluidic efficiency in droplet transportation comparing with that of the ZnO/Si SAW device. An optimized temperature coefficient of frequency of −23.4 ppm °C−1 was obtained for the SAW devices with the 2.72 µm-thick ZnO and 1.1 µm-thick UNCD film. Significant thermal effect due to the acoustic heating has been redcued which is related to the temperature stability of the ZnO/UNCD SAW device.",

keywords = "diamond, nanocrystalline materials, sputtering, surface acoustic waves, thin films, ZnO",

author = "Hua-Feng Pang and Luis Garcia-Gancedo and Fu, \{Yong Qing\} and Samuele Porro and Yan-Wei Gu and Jikui Luo and Xiao-Tao Zu and Frank Placido and Wilson, \{John I.\} and Andrew Flewitt and William Milne",

year = "2013",

month = aug,

doi = "10.1002/pssa.201228631",

language = "English",

volume = "210",

pages = "1575--1583",

journal = "physica status solidi (a)",

issn = "1862-6300",

publisher = "Blackwell Publishing",

number = "8",

}

TY - JOUR

T1 - Characterization of the surface acoustic wave devices based on ZnO/nanocrystalline diamond structures

AU - Pang, Hua-Feng

AU - Garcia-Gancedo, Luis

AU - Fu, Yong Qing

AU - Porro, Samuele

AU - Gu, Yan-Wei

AU - Luo, Jikui

AU - Zu, Xiao-Tao

AU - Placido, Frank

AU - Wilson, John I.

AU - Flewitt, Andrew

AU - Milne, William

PY - 2013/8

Y1 - 2013/8

N2 - Nanocrystalline ZnO films with strong (0002) texture and fine grains were deposited onto ultra-nanocrystalline diamond (UNCD) layers on silicon using high target utilization sputtering technology. The unique characteristic of this sputtering technique allows room temperature growth of smooth ZnO films with a low roughness and low stress at high growth rates. Surface acoustic wave (SAW) devices were fabricated on ZnO/UNCD structure and exhibited good transmission signals with a low insertion loss and a strong side-lobe suppression for the Rayleigh mode SAW. Based on the optimization of the layered structure of the SAW device, a good performance with a coupling coefficient of 5.2% has been realized, promising for improving the microfluidic efficiency in droplet transportation comparing with that of the ZnO/Si SAW device. An optimized temperature coefficient of frequency of −23.4 ppm °C−1 was obtained for the SAW devices with the 2.72 µm-thick ZnO and 1.1 µm-thick UNCD film. Significant thermal effect due to the acoustic heating has been redcued which is related to the temperature stability of the ZnO/UNCD SAW device.

AB - Nanocrystalline ZnO films with strong (0002) texture and fine grains were deposited onto ultra-nanocrystalline diamond (UNCD) layers on silicon using high target utilization sputtering technology. The unique characteristic of this sputtering technique allows room temperature growth of smooth ZnO films with a low roughness and low stress at high growth rates. Surface acoustic wave (SAW) devices were fabricated on ZnO/UNCD structure and exhibited good transmission signals with a low insertion loss and a strong side-lobe suppression for the Rayleigh mode SAW. Based on the optimization of the layered structure of the SAW device, a good performance with a coupling coefficient of 5.2% has been realized, promising for improving the microfluidic efficiency in droplet transportation comparing with that of the ZnO/Si SAW device. An optimized temperature coefficient of frequency of −23.4 ppm °C−1 was obtained for the SAW devices with the 2.72 µm-thick ZnO and 1.1 µm-thick UNCD film. Significant thermal effect due to the acoustic heating has been redcued which is related to the temperature stability of the ZnO/UNCD SAW device.

KW - diamond

KW - nanocrystalline materials

KW - sputtering

KW - surface acoustic waves

KW - thin films

KW - ZnO

UR - https://www.scopus.com/pages/publications/84882315071

U2 - 10.1002/pssa.201228631

DO - 10.1002/pssa.201228631

M3 - Article

SN - 1862-6300

VL - 210

SP - 1575

EP - 1583

JO - physica status solidi (a)

JF - physica status solidi (a)

IS - 8

ER -

Characterization of the surface acoustic wave devices based on ZnO/nanocrystalline diamond structures

Abstract

Keywords

Access to Document

Other files and links

Fingerprint

Cite this