Skip to main navigation Skip to search Skip to main content

Comparison of Conventional and Maskless Lithographic Techniques for More than Moore Post-processing of Foundry CMOS Chips

Andreas Tsiamis, Yifan Li, Camelia Dunare, Jamie Marland, Ewen Blair, Stewart Smith, Jonathan G. Terry, Srinjoy Mitra, Ian Underwood, Alan Murray, Anthony J. Walton

    Research output: Contribution to journal › Article › peer-review

    10 Citations (Scopus)
    153 Downloads (Pure)

    Fingerprint

    Dive into the research topics of 'Comparison of Conventional and Maskless Lithographic Techniques for More than Moore Post-processing of Foundry CMOS Chips'. Together they form a unique fingerprint.
    Sort by

    Engineering

    Material Science