Comparison of Conventional and Maskless Lithographic Techniques for More than Moore Post-processing of Foundry CMOS Chips

Andreas Tsiamis, Yifan Li, Camelia Dunare, Jamie Marland, Ewen Blair, Stewart Smith, Jonathan G. Terry, Srinjoy Mitra, Ian Underwood, Alan Murray, Anthony J. Walton

Research output: Contribution to journalArticlepeer-review

82 Downloads (Pure)

Fingerprint Dive into the research topics of 'Comparison of Conventional and Maskless Lithographic Techniques for More than Moore Post-processing of Foundry CMOS Chips'. Together they form a unique fingerprint.

Engineering & Materials Science