In this research study, the creep behaviour and adhesion resistance of TiC thin films grown using RF magnetron sputtering under different deposition parameters were investigated. Radio frequency (RF) magnetron sputter was used to coat the surface of CpTi with TiC target. Field electron scanning electron microscope was used to study the film morphology, and the hardness, young modulus, and creep behaviour tests were performed using TI 950 Triboindenter. The adhesion resistance property was investigated using a microscratch tester under ambient working condition. From the results, the TiC thin film morphology structures show different growth modes as the RF power changes. Films with uniform surface morphology show better adhesion resistance to peeling than films with high surface asperities, while films with heterogeneous distribution of the TiC thin films show high hardness values.