Creep behaviour and adhesion properties of tic thin film coating grown by rf magnetron sputtering

Abegunde Olayinka*, Esther T. Akinlabi, O. P. Oladijo

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review


In this research study, the creep behaviour and adhesion resistance of TiC thin films grown using RF magnetron sputtering under different deposition parameters were investigated. Radio frequency (RF) magnetron sputter was used to coat the surface of CpTi with TiC target. Field electron scanning electron microscope was used to study the film morphology, and the hardness, young modulus, and creep behaviour tests were performed using TI 950 Triboindenter. The adhesion resistance property was investigated using a microscratch tester under ambient working condition. From the results, the TiC thin film morphology structures show different growth modes as the RF power changes. Films with uniform surface morphology show better adhesion resistance to peeling than films with high surface asperities, while films with heterogeneous distribution of the TiC thin films show high hardness values.

Original languageEnglish
Title of host publicationAdvances in Manufacturing Engineering - Selected Articles from ICMMPE 2019
EditorsSeyed Sattar Emamian, Farazila Yusof, Mokhtar Awang
Number of pages8
ISBN (Print)9789811557521
Publication statusPublished - 2020
Externally publishedYes
Event5th International Conference on Mechanical, Manufacturing and Plant Engineering, ICMMPE 2019 - Kuala Lumpur, Malaysia
Duration: 19 Nov 201921 Nov 2019

Publication series

NameLecture Notes in Mechanical Engineering
ISSN (Print)2195-4356
ISSN (Electronic)2195-4364


Conference5th International Conference on Mechanical, Manufacturing and Plant Engineering, ICMMPE 2019
CityKuala Lumpur

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