Dataset on microstructural, structural and tribology characterization of TiC thin film on CpTi substrate grown by RF magnetron sputtering

Olayinka Oluwatosin Abegunde; Esther Titilayo Akinlabi; Philip Oluseyi Oladijo

doi:10.1016/j.dib.2020.105205

Dataset on microstructural, structural and tribology characterization of TiC thin film on CpTi substrate grown by RF magnetron sputtering

Olayinka Oluwatosin Abegunde^*, Esther Titilayo Akinlabi, Philip Oluseyi Oladijo

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

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Abstract

The datasets in this article are supplementary to the corresponding research article [1, 2]. The planar morphology and topography of TiC thin films coated on commercially pure Titanium (CpTi) grown by RF magnetron sputtering were investigated using Field emission scanning electron microscope (FESEM) and Atomic force microscope (AFM). The mechanical properties such as Hardness and Young Modulus of the thin film coating was studied using Nanohardness. Furthermore, grazing incidence X-ray diffractometer (GIXRD) and Raman spectroscopy were used to analyse the structural and composition of the TiC thin film coating.

Original language	English
Article number	105205
Journal	Data in Brief
Volume	29
Early online date	25 Jan 2020
DOIs	https://doi.org/10.1016/j.dib.2020.105205
Publication status	Published - 1 Apr 2020
Externally published	Yes

Keywords

Atomic force microscope (AFM)
Field emission scanning electron microscope (FESEM)
Grazing incidence X-ray diffractometer (GIXRD)
Nanohardness
Raman spectroscopy
RF magnetron sputtering
TiC thin film

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10.1016/j.dib.2020.105205Licence: CC BY

1-s2.0-S2352340920300998-mainFinal published version, 1.61 MBLicence: CC BY

Cite this

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title = "Dataset on microstructural, structural and tribology characterization of TiC thin film on CpTi substrate grown by RF magnetron sputtering",

abstract = "The datasets in this article are supplementary to the corresponding research article [1, 2]. The planar morphology and topography of TiC thin films coated on commercially pure Titanium (CpTi) grown by RF magnetron sputtering were investigated using Field emission scanning electron microscope (FESEM) and Atomic force microscope (AFM). The mechanical properties such as Hardness and Young Modulus of the thin film coating was studied using Nanohardness. Furthermore, grazing incidence X-ray diffractometer (GIXRD) and Raman spectroscopy were used to analyse the structural and composition of the TiC thin film coating.",

keywords = "Atomic force microscope (AFM), Field emission scanning electron microscope (FESEM), Grazing incidence X-ray diffractometer (GIXRD), Nanohardness, Raman spectroscopy, RF magnetron sputtering, TiC thin film",

author = "Abegunde, {Olayinka Oluwatosin} and Akinlabi, {Esther Titilayo} and Oladijo, {Philip Oluseyi}",

note = "Funding information: The authors would like to acknowledge the Council of Scientific and Industrial Research, South Africa for funding this research work.",

year = "2020",

month = apr,

day = "1",

doi = "10.1016/j.dib.2020.105205",

language = "English",

volume = "29",

journal = "Data in Brief",

issn = "2352-3409",

publisher = "Elsevier",

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TY - JOUR

T1 - Dataset on microstructural, structural and tribology characterization of TiC thin film on CpTi substrate grown by RF magnetron sputtering

AU - Abegunde, Olayinka Oluwatosin

AU - Akinlabi, Esther Titilayo

AU - Oladijo, Philip Oluseyi

N1 - Funding information: The authors would like to acknowledge the Council of Scientific and Industrial Research, South Africa for funding this research work.

PY - 2020/4/1

Y1 - 2020/4/1

N2 - The datasets in this article are supplementary to the corresponding research article [1, 2]. The planar morphology and topography of TiC thin films coated on commercially pure Titanium (CpTi) grown by RF magnetron sputtering were investigated using Field emission scanning electron microscope (FESEM) and Atomic force microscope (AFM). The mechanical properties such as Hardness and Young Modulus of the thin film coating was studied using Nanohardness. Furthermore, grazing incidence X-ray diffractometer (GIXRD) and Raman spectroscopy were used to analyse the structural and composition of the TiC thin film coating.

AB - The datasets in this article are supplementary to the corresponding research article [1, 2]. The planar morphology and topography of TiC thin films coated on commercially pure Titanium (CpTi) grown by RF magnetron sputtering were investigated using Field emission scanning electron microscope (FESEM) and Atomic force microscope (AFM). The mechanical properties such as Hardness and Young Modulus of the thin film coating was studied using Nanohardness. Furthermore, grazing incidence X-ray diffractometer (GIXRD) and Raman spectroscopy were used to analyse the structural and composition of the TiC thin film coating.

KW - Atomic force microscope (AFM)

KW - Field emission scanning electron microscope (FESEM)

KW - Grazing incidence X-ray diffractometer (GIXRD)

KW - Nanohardness

KW - Raman spectroscopy

KW - RF magnetron sputtering

KW - TiC thin film

UR - http://www.scopus.com/inward/record.url?scp=85078836210&partnerID=8YFLogxK

U2 - 10.1016/j.dib.2020.105205

DO - 10.1016/j.dib.2020.105205

M3 - Article

AN - SCOPUS:85078836210

SN - 2352-3409

VL - 29

JO - Data in Brief

JF - Data in Brief

M1 - 105205

ER -

Dataset on microstructural, structural and tribology characterization of TiC thin film on CpTi substrate grown by RF magnetron sputtering

Abstract

Keywords

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