Depth Profiling of Si Oxidation States in Si-Implanted SiO2Films by X-Ray Photoelectron Spectroscopy

Yang Liu, Yong Qing Fu, Tu Pei Chen, Man Siu Tse, Steve Fung, Jang-Hsing Hsieh, Xiao Hong Yang

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7 Citations (Scopus)

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Engineering & Materials Science

Physics & Astronomy