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Depth Profiling of Si Oxidation States in Si-Implanted SiO2Films by X-Ray Photoelectron Spectroscopy
Yang Liu, Yong Qing Fu, Tu Pei Chen, Man Siu Tse, Steve Fung, Jang-Hsing Hsieh, Xiao Hong Yang
Research output: Contribution to journal › Article › peer-review
7
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(Scopus)