Diamond and hard carbon films for microelectromechanical systems (MEMS) - A nanotribological study

Engineering & Materials Science

• Amorphous carbon 49%
• Applicators 43%
• Atomic force microscopy 40%
• Carbon films 100%
• Cathodes 31%
• Diamond films 48%
• Diamonds 63%
• Gas mixtures 72%
• MEMS 59%
• Microwaves 56%
• Plasma enhanced chemical vapor deposition 90%
• Pulsed lasers 43%
• Raman spectroscopy 42%
• Vacuum 28%

Physics & Astronomy

• carbon 42%
• carbon arcs 33%
• cathodes 17%
• diamond films 23%
• diamonds 50%
• gas mixtures 40%
• microelectromechanical systems 61%
• microscopy 14%
• microwaves 28%
• pulsed lasers 18%
• Raman spectroscopy 18%
• reactor design 56%
• reactors 16%
• scanning 13%
• vacuum 13%
• vapor deposition 32%
• wafers 16%

Chemical Compounds

• Amorphous Material 11%
• Diamond 60%
• Force 10%
• Gas 16%
• Liquid Film 30%
• Plasma Enhanced Chemical Vapour Deposition 38%
• Raman Spectroscopy 12%
• Vacuum Arc 23%