Diffraction grating based optical readout for thermal imaging

Ulas Adiyan, R. Burak Erarslan, Onur Ferhanoglu, Hamdi Torun, Hakan Urey

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

3 Citations (Scopus)


The thermal sensor system presented in this paper is based on the mechanical bending due to the incident IR radiation. A diffraction grating is embedded under each pixel to facilitate optical readout. Typically the first diffraction order is used to monitor the sub-micron mechanical displacement with sub-nanometer precision. In this work; two different optical readout systems based on diffraction gratings are analyzed. First setup employs a conventional 4f optical system. In this one-to-one imaging system, collimated light is propagated through a lens, filtered with an aperture and then imaged onto a CCD by a second lens. Second system is more compact to improve image quality and to reduce noise. This is achieved by using an off-axis converging laser beam illumination that forms the Fourier plane near the imaging lens. This approach has important advantages such as reducing number of optical components and minimizing the optical path. The system was optimized considering parameters such as laser converging angle, laser beam size at MEMS chip, and magnification of the imaging system.

Original languageEnglish
Title of host publicationOptical Systems Design 2012
Number of pages5
ISBN (Print)9780819493019
Publication statusPublished - 18 Dec 2012
EventOptical Systems Design 2012 - Barcelona, Spain
Duration: 26 Nov 201229 Nov 2012


ConferenceOptical Systems Design 2012


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