TY - GEN
T1 - Effect of afm scan size on the scaling law of sputtered aluminium thin films
AU - Mwema, F. M.
AU - Akinlabi, Esther T.
AU - Oladijo, O. P.
AU - Akinlabi, Stephen A.
AU - Hassan, S.
N1 - Funding Information:
Acknowledgements The Global Excellence and Stature (GES) 4.0 funding for Postdoctoral Research Fellowship by the University of Johannesburg is acknowledged.
Publisher Copyright:
© Springer Nature Singapore Pte Ltd 2020.
PY - 2020
Y1 - 2020
N2 - The effect of scan size of the atomic force microscopy (AFM) imaging on the fractal characteristics of aluminium thin films deposited on stainless steel substrates by radiofrequency magnetron sputtering is presented. Three scan sizes of 3 × 3 μm, 5 × 5 μm and 10 × 10 μm were used to obtain the images on the AFM facility. Visual examination revealed that using very high scan size (10 × 10 μm) captured poorer images, although with more features. One-dimensional fractal dimensions were obtained as 1.610 ± 0.012, 1.606 ± 0.011 and 1.563 ± 0.014 for scan sizes of 3 × 3 μm, 5 × 5 μm and 10 × 10 μm, respectively. Multifractal analyses revealed that images obtained at lower scan sizes (3 × 3 μm and 5 × 5 μm) were mono-fractal, whereas those obtained at scan size of 10 × 10 μm were multifractal. The results suggest that the scan size can significantly influence the scaling results of the AFM measurements and therefore should be carefully chosen.
AB - The effect of scan size of the atomic force microscopy (AFM) imaging on the fractal characteristics of aluminium thin films deposited on stainless steel substrates by radiofrequency magnetron sputtering is presented. Three scan sizes of 3 × 3 μm, 5 × 5 μm and 10 × 10 μm were used to obtain the images on the AFM facility. Visual examination revealed that using very high scan size (10 × 10 μm) captured poorer images, although with more features. One-dimensional fractal dimensions were obtained as 1.610 ± 0.012, 1.606 ± 0.011 and 1.563 ± 0.014 for scan sizes of 3 × 3 μm, 5 × 5 μm and 10 × 10 μm, respectively. Multifractal analyses revealed that images obtained at lower scan sizes (3 × 3 μm and 5 × 5 μm) were mono-fractal, whereas those obtained at scan size of 10 × 10 μm were multifractal. The results suggest that the scan size can significantly influence the scaling results of the AFM measurements and therefore should be carefully chosen.
KW - Aluminium
KW - Atomic force microscopy (AFM)
KW - Scan size
KW - Sputtering
KW - Thin films
UR - http://www.scopus.com/inward/record.url?scp=85091280851&partnerID=8YFLogxK
U2 - 10.1007/978-981-15-5753-8_16
DO - 10.1007/978-981-15-5753-8_16
M3 - Conference contribution
AN - SCOPUS:85091280851
SN - 9789811557521
T3 - Lecture Notes in Mechanical Engineering
SP - 171
EP - 176
BT - Advances in Manufacturing Engineering - Selected Articles from ICMMPE 2019
A2 - Emamian, Seyed Sattar
A2 - Yusof, Farazila
A2 - Awang, Mokhtar
PB - Springer
T2 - 5th International Conference on Mechanical, Manufacturing and Plant Engineering, ICMMPE 2019
Y2 - 19 November 2019 through 21 November 2019
ER -