Effect of composition on surface relief morphology in TiNiCu thin films

M. Cai; Yong Qing Fu; Sohrab Sanjabi; Zoe Barber; J. T. Dickinson

doi:10.1016/j.surfcoat.2006.10.033

Effect of composition on surface relief morphology in TiNiCu thin films

M. Cai, Yong Qing Fu, Sohrab Sanjabi, Zoe Barber, J. T. Dickinson

Research output: Contribution to journal › Article › peer-review

9 Citations (Scopus)

Abstract

TiNiCu films were deposited on a (100) type Si substrates by co-sputtering of TiNi and Cu targets at room temperature, and then post-annealed at 450 °C for crystallization. Significant surface relief due to martensitic transformation occurred on the film surface after cooling, and variations in surface relief morphology (the size and density of martensite crystals) have been quantified with atomic force microscopy. Energy dispersive X-ray analysis showed that the surface relief morphological difference in the TiNiCu films is due to the change in composition. It was proposed that the crystallization of the amorphous thin film during annealing behaved differently with chemical composition, which in turn induced fluctuations in phase transformation temperatures at various regions, as confirmed by differential scanning calorimeter measurements.

Original language	English
Pages (from-to)	5843-5849
Journal	Surface and Coatings Technology
Volume	201
Issue number	12
DOIs	https://doi.org/10.1016/j.surfcoat.2006.10.033
Publication status	Published - 5 Mar 2007

Keywords

Crystallization
Martensitic transformation
Surface relief
Shape memory alloys

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10.1016/j.surfcoat.2006.10.033

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title = "Effect of composition on surface relief morphology in TiNiCu thin films",

abstract = "TiNiCu films were deposited on a (100) type Si substrates by co-sputtering of TiNi and Cu targets at room temperature, and then post-annealed at 450 °C for crystallization. Significant surface relief due to martensitic transformation occurred on the film surface after cooling, and variations in surface relief morphology (the size and density of martensite crystals) have been quantified with atomic force microscopy. Energy dispersive X-ray analysis showed that the surface relief morphological difference in the TiNiCu films is due to the change in composition. It was proposed that the crystallization of the amorphous thin film during annealing behaved differently with chemical composition, which in turn induced fluctuations in phase transformation temperatures at various regions, as confirmed by differential scanning calorimeter measurements.",

keywords = "Crystallization, Martensitic transformation, Surface relief, Shape memory alloys",

author = "M. Cai and Fu, \{Yong Qing\} and Sohrab Sanjabi and Zoe Barber and Dickinson, \{J. T.\}",

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TY - JOUR

T1 - Effect of composition on surface relief morphology in TiNiCu thin films

AU - Cai, M.

AU - Fu, Yong Qing

AU - Sanjabi, Sohrab

AU - Barber, Zoe

AU - Dickinson, J. T.

PY - 2007/3/5

Y1 - 2007/3/5

N2 - TiNiCu films were deposited on a (100) type Si substrates by co-sputtering of TiNi and Cu targets at room temperature, and then post-annealed at 450 °C for crystallization. Significant surface relief due to martensitic transformation occurred on the film surface after cooling, and variations in surface relief morphology (the size and density of martensite crystals) have been quantified with atomic force microscopy. Energy dispersive X-ray analysis showed that the surface relief morphological difference in the TiNiCu films is due to the change in composition. It was proposed that the crystallization of the amorphous thin film during annealing behaved differently with chemical composition, which in turn induced fluctuations in phase transformation temperatures at various regions, as confirmed by differential scanning calorimeter measurements.

AB - TiNiCu films were deposited on a (100) type Si substrates by co-sputtering of TiNi and Cu targets at room temperature, and then post-annealed at 450 °C for crystallization. Significant surface relief due to martensitic transformation occurred on the film surface after cooling, and variations in surface relief morphology (the size and density of martensite crystals) have been quantified with atomic force microscopy. Energy dispersive X-ray analysis showed that the surface relief morphological difference in the TiNiCu films is due to the change in composition. It was proposed that the crystallization of the amorphous thin film during annealing behaved differently with chemical composition, which in turn induced fluctuations in phase transformation temperatures at various regions, as confirmed by differential scanning calorimeter measurements.

KW - Crystallization

KW - Martensitic transformation

KW - Surface relief

KW - Shape memory alloys

UR - https://www.scopus.com/pages/publications/33846593498

U2 - 10.1016/j.surfcoat.2006.10.033

DO - 10.1016/j.surfcoat.2006.10.033

M3 - Article

SN - 0257-8972

SN - 1879-3347

VL - 201

SP - 5843

EP - 5849

JO - Surface and Coatings Technology

JF - Surface and Coatings Technology

IS - 12

ER -

Effect of composition on surface relief morphology in TiNiCu thin films

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Keywords

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