Elastic instabilities induced large surface strain sensing structures (EILS)

Yifan Li, Jonathan Terry, S. Smith, Anthony Walton, Glen McHale, Ben Xu

Research output: Chapter in Book/Report/Conference proceedingChapterpeer-review

1 Citation (Scopus)

Abstract

This paper reports on the sensing of large strain using a mechanically actuated switch gate and a variable resistor surface creasing test structure. Test structures with different gate and interconnect/wiring geometries have been designed, fabricated and characterised. They respond to designed strain values with a reduction in device resistivity of 11 to 12 orders of magnitude. Results from strain measurements ranging from 0.2 to 0.6 are reported for test structures with electrode spaces of 10 to 60 μm.
Original languageEnglish
Title of host publicationProceedings of the 2015 International Conference on Microelectronic Test Structures
Place of PublicationPiscataway, NJ
PublisherIEEE
Pages94-99
ISBN (Print)978-4799-8304-9
DOIs
Publication statusPublished - 2015

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