Elastic instabilities induced large surface strain sensing structures (EILS)

Yifan Li; Jonathan Terry; S. Smith; Anthony Walton; Glen McHale; Ben Xu

doi:10.1109/ICMTS.2015.7106116

Elastic instabilities induced large surface strain sensing structures (EILS)

Yifan Li, Jonathan Terry, S. Smith, Anthony Walton, Glen McHale, Ben Xu

Research output: Chapter in Book/Report/Conference proceeding › Chapter › peer-review

1 Citation (Scopus)

Abstract

This paper reports on the sensing of large strain using a mechanically actuated switch gate and a variable resistor surface creasing test structure. Test structures with different gate and interconnect/wiring geometries have been designed, fabricated and characterised. They respond to designed strain values with a reduction in device resistivity of 11 to 12 orders of magnitude. Results from strain measurements ranging from 0.2 to 0.6 are reported for test structures with electrode spaces of 10 to 60 μm.

Original language	English
Title of host publication	Proceedings of the 2015 International Conference on Microelectronic Test Structures
Place of Publication	Piscataway, NJ
Publisher	IEEE
Pages	94-99
ISBN (Print)	978-4799-8304-9
DOIs	https://doi.org/10.1109/ICMTS.2015.7106116
Publication status	Published - 2015

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10.1109/ICMTS.2015.7106116

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title = "Elastic instabilities induced large surface strain sensing structures (EILS)",

abstract = "This paper reports on the sensing of large strain using a mechanically actuated switch gate and a variable resistor surface creasing test structure. Test structures with different gate and interconnect/wiring geometries have been designed, fabricated and characterised. They respond to designed strain values with a reduction in device resistivity of 11 to 12 orders of magnitude. Results from strain measurements ranging from 0.2 to 0.6 are reported for test structures with electrode spaces of 10 to 60 μm.",

author = "Yifan Li and Jonathan Terry and S. Smith and Anthony Walton and Glen McHale and Ben Xu",

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AU - Terry, Jonathan

AU - Smith, S.

AU - Walton, Anthony

AU - McHale, Glen

AU - Xu, Ben

PY - 2015

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N2 - This paper reports on the sensing of large strain using a mechanically actuated switch gate and a variable resistor surface creasing test structure. Test structures with different gate and interconnect/wiring geometries have been designed, fabricated and characterised. They respond to designed strain values with a reduction in device resistivity of 11 to 12 orders of magnitude. Results from strain measurements ranging from 0.2 to 0.6 are reported for test structures with electrode spaces of 10 to 60 μm.

AB - This paper reports on the sensing of large strain using a mechanically actuated switch gate and a variable resistor surface creasing test structure. Test structures with different gate and interconnect/wiring geometries have been designed, fabricated and characterised. They respond to designed strain values with a reduction in device resistivity of 11 to 12 orders of magnitude. Results from strain measurements ranging from 0.2 to 0.6 are reported for test structures with electrode spaces of 10 to 60 μm.

UR - https://www.scopus.com/pages/publications/84940745330

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DO - 10.1109/ICMTS.2015.7106116

M3 - Chapter

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EP - 99

BT - Proceedings of the 2015 International Conference on Microelectronic Test Structures

PB - IEEE

CY - Piscataway, NJ

ER -

Elastic instabilities induced large surface strain sensing structures (EILS)

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