TY - JOUR
T1 - Elastic loading enhanced NH3 sensing for surface acoustic wave sensor with highly porous nitrogen doped diamond like carbon film
AU - Zhu, Hao
AU - Xie, Dong
AU - Lin, Sixu
AU - Zhang, Wenting
AU - Yang, Youwei
AU - Zhang, Ruijie
AU - Shi, Xing
AU - Wang, Hongyan
AU - Zhang, Zhengquan
AU - Zu, Xiaotao
AU - Fu, Yongqing
AU - Tang, Yongliang
N1 - Funding Information: This work was supported by the Fundamental Research Funds for the Central Universities (2682019CX68), the Scientific Research Foundation of SWJTU (A1920502051907-2-032), the National Natural Science Foundation of China (51902272), the UK Engineering and Physical Sciences Research Council (EPSRC) grants EP/P018998/1, Newton Mobility Grant (IE161019) through Royal Society and the National Natural Science Foundation of China.
PY - 2021/10/1
Y1 - 2021/10/1
N2 - We proposed a surface acoustic wave (SAW) NH3 gas sensor based on nitrogen doped diamond like carbon (N-DLC) film. The N-DLC film, prepared using a microwave electron cyclotron resonance plasma chemical vapor deposition (ECR-PECVD) method, is highly porous and physically and chemically stable, and have active polar groups on its surface, which can selectively absorb polar NH3 gas molecules. These features of the film lead to the high sensitivity, low noise and excellent stability of the sensor. The sensor can achieve capabilities of in-situ monitoring NH3 in a concentration range from 100 ppb to 100 ppm with fast response (∼5 s) and recovery (∼29 s) at room temperature. The NH3 sensing mechanism is attributed to the decreased porosity of the N-DLC film caused by adsorbed NH3 molecules on its polar groups, which leads an increase of the elastic modulus of the film.
AB - We proposed a surface acoustic wave (SAW) NH3 gas sensor based on nitrogen doped diamond like carbon (N-DLC) film. The N-DLC film, prepared using a microwave electron cyclotron resonance plasma chemical vapor deposition (ECR-PECVD) method, is highly porous and physically and chemically stable, and have active polar groups on its surface, which can selectively absorb polar NH3 gas molecules. These features of the film lead to the high sensitivity, low noise and excellent stability of the sensor. The sensor can achieve capabilities of in-situ monitoring NH3 in a concentration range from 100 ppb to 100 ppm with fast response (∼5 s) and recovery (∼29 s) at room temperature. The NH3 sensing mechanism is attributed to the decreased porosity of the N-DLC film caused by adsorbed NH3 molecules on its polar groups, which leads an increase of the elastic modulus of the film.
KW - Elastic modulus
KW - N doped DLC
KW - NH gas sensor
KW - Surface acoustic wave (SAW)
UR - http://www.scopus.com/inward/record.url?scp=85107154228&partnerID=8YFLogxK
U2 - 10.1016/j.snb.2021.130175
DO - 10.1016/j.snb.2021.130175
M3 - Article
AN - SCOPUS:85107154228
SN - 0925-4005
VL - 344
SP - 1
EP - 9
JO - Sensors and Actuators, B: Chemical
JF - Sensors and Actuators, B: Chemical
M1 - 130175
ER -