Engineering Silver Nanostructures for Surface Acoustic Wave Humidity Sensors Sensitivity Enhancement

D. J. Li; Chao Zhao; Yong Qing Fu; J. K. Luo

doi:10.1149/2.094406jes

Engineering Silver Nanostructures for Surface Acoustic Wave Humidity Sensors Sensitivity Enhancement

D. J. Li, Chao Zhao, Yong Qing Fu, J. K. Luo

Research output: Contribution to journal › Article › peer-review

13 Citations (Scopus)

Abstract

In this paper, the sensitivity of the LiNbO3 surface acoustic wave (SAW) based humidity sensors has been enhanced with various nanostructured Ag materials, including thermally evaporated or chemically synthesized, and then thermally annealed ones. The results showed that the humidity sensitivity of the SAW devices increases with the surface roughness (porosity) of the sensing film, and can be further improved when Ag NPs are used. Smooth Ag film deposited by evaporation onto the SAW devices did not change the humidity sensitivity noticeably, but those with chemically deposited high porosity Ag films have a good sensitivity of 80 kHz/75%RH. The SAW sensors with the Ag NPs have the highest sensitivity up to about 800 kHz/75%RH, at least one order of magnitude higher than those reported before. The SAW sensors with Ag nano-particles showed a strong non-linearity, and explained by the different chemisorption capabilities of Ag and LiNbO3 surface.

Original language	English
Pages (from-to)	B151-B156
Journal	Journal of the Electrochemical Society
Volume	161
Issue number	6
DOIs	https://doi.org/10.1149/2.094406jes
Publication status	Published - 15 May 2014

Access to Document

10.1149/2.094406jes

Cite this

@article{f4551e145c104ac0a3aa49e44f978182,

title = "Engineering Silver Nanostructures for Surface Acoustic Wave Humidity Sensors Sensitivity Enhancement",

abstract = "In this paper, the sensitivity of the LiNbO3 surface acoustic wave (SAW) based humidity sensors has been enhanced with various nanostructured Ag materials, including thermally evaporated or chemically synthesized, and then thermally annealed ones. The results showed that the humidity sensitivity of the SAW devices increases with the surface roughness (porosity) of the sensing film, and can be further improved when Ag NPs are used. Smooth Ag film deposited by evaporation onto the SAW devices did not change the humidity sensitivity noticeably, but those with chemically deposited high porosity Ag films have a good sensitivity of 80 kHz/75%RH. The SAW sensors with the Ag NPs have the highest sensitivity up to about 800 kHz/75%RH, at least one order of magnitude higher than those reported before. The SAW sensors with Ag nano-particles showed a strong non-linearity, and explained by the different chemisorption capabilities of Ag and LiNbO3 surface.",

author = "Li, {D. J.} and Chao Zhao and Fu, {Yong Qing} and Luo, {J. K.}",

year = "2014",

month = may,

day = "15",

doi = "10.1149/2.094406jes",

language = "English",

volume = "161",

pages = "B151--B156",

journal = "Journal of the Electrochemical Society",

issn = "0013-4651",

publisher = "Electrochemical Society, Inc.",

number = "6",

}

TY - JOUR

T1 - Engineering Silver Nanostructures for Surface Acoustic Wave Humidity Sensors Sensitivity Enhancement

AU - Li, D. J.

AU - Zhao, Chao

AU - Fu, Yong Qing

AU - Luo, J. K.

PY - 2014/5/15

Y1 - 2014/5/15

N2 - In this paper, the sensitivity of the LiNbO3 surface acoustic wave (SAW) based humidity sensors has been enhanced with various nanostructured Ag materials, including thermally evaporated or chemically synthesized, and then thermally annealed ones. The results showed that the humidity sensitivity of the SAW devices increases with the surface roughness (porosity) of the sensing film, and can be further improved when Ag NPs are used. Smooth Ag film deposited by evaporation onto the SAW devices did not change the humidity sensitivity noticeably, but those with chemically deposited high porosity Ag films have a good sensitivity of 80 kHz/75%RH. The SAW sensors with the Ag NPs have the highest sensitivity up to about 800 kHz/75%RH, at least one order of magnitude higher than those reported before. The SAW sensors with Ag nano-particles showed a strong non-linearity, and explained by the different chemisorption capabilities of Ag and LiNbO3 surface.

AB - In this paper, the sensitivity of the LiNbO3 surface acoustic wave (SAW) based humidity sensors has been enhanced with various nanostructured Ag materials, including thermally evaporated or chemically synthesized, and then thermally annealed ones. The results showed that the humidity sensitivity of the SAW devices increases with the surface roughness (porosity) of the sensing film, and can be further improved when Ag NPs are used. Smooth Ag film deposited by evaporation onto the SAW devices did not change the humidity sensitivity noticeably, but those with chemically deposited high porosity Ag films have a good sensitivity of 80 kHz/75%RH. The SAW sensors with the Ag NPs have the highest sensitivity up to about 800 kHz/75%RH, at least one order of magnitude higher than those reported before. The SAW sensors with Ag nano-particles showed a strong non-linearity, and explained by the different chemisorption capabilities of Ag and LiNbO3 surface.

U2 - 10.1149/2.094406jes

DO - 10.1149/2.094406jes

M3 - Article

SN - 0013-4651

VL - 161

SP - B151-B156

JO - Journal of the Electrochemical Society

JF - Journal of the Electrochemical Society

IS - 6

ER -

Engineering Silver Nanostructures for Surface Acoustic Wave Humidity Sensors Sensitivity Enhancement

Abstract

Access to Document

Fingerprint

Cite this