Abstract
We report on the development of a surface micromachined process for the fabrication of coaxial apertures surrounded by periodic grooves. The process uses a combination of copper electroforming and the negative epoxy based resist, SU8, as a thin flexible substrate. The device dimensions are suitable for the implementation of filters at THz frequencies, and measurements show a pass band centred around 1.5 THz. These devices could form the basis of the next generation of THz biosensors.
Original language | English |
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Article number | 632316 |
Journal | Proceedings of SPIE. |
Volume | 6323 |
DOIs | |
Publication status | Published - 30 Aug 2006 |