Enhancement of microfluidic efficiency with nanocrystalline diamond interlayer in the ZnO-based surface acoustic wave device

Hua-Feng Pang, Yong Qing Fu, Luis Garcia-Gancedo, Samuele Porro, Jikui Luo, Frank Placido, John I. Wilson, Andrew Flewitt, William Milne, Xiao-Tao Zu

Research output: Contribution to journalArticlepeer-review

13 Citations (Scopus)

Abstract

Ultra-smooth nanocrystalline diamond (UNCD) films with high-acoustic wave velocity were introduced into ZnO-based surface acoustic wave (SAW) devices to enhance their microfluidic efficiency by reducing the acoustic energy dissipation into the silicon substrate and improving the acoustic properties of the SAW devices. Microfluidic efficiency of the ZnO-based SAW devices with and without UNCD inter layers was investigated and compared. Results showed that the pumping velocities increase with the input power and those of the ZnO/UNCD/Si devices are much larger than those of the ZnO/Si devices at the same power. The jetting efficiency of the droplet was improved by introducing the UNCD interlayer into the ZnO/Si SAW device. Improvement in the microfluidic efficiency is mainly attributed to the diamond layer, which restrains the acoustic wave to propagate in the top layer rather than dissipating into the substrate.
Original languageEnglish
Pages (from-to)377-386
JournalMicrofluidics and Nanofluidics
Volume15
Issue number3
DOIs
Publication statusPublished - Sep 2013

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