Enhancement of microfluidic efficiency with nanocrystalline diamond interlayer in the ZnO-based surface acoustic wave device

Hua-Feng Pang; Yong Qing Fu; Luis Garcia-Gancedo; Samuele Porro; Jikui Luo; Frank Placido; John I. Wilson; Andrew Flewitt; William Milne; Xiao-Tao Zu

doi:10.1007/s10404-013-1155-3

Enhancement of microfluidic efficiency with nanocrystalline diamond interlayer in the ZnO-based surface acoustic wave device

Hua-Feng Pang, Yong Qing Fu, Luis Garcia-Gancedo, Samuele Porro, Jikui Luo, Frank Placido, John I. Wilson, Andrew Flewitt, William Milne, Xiao-Tao Zu

Research output: Contribution to journal › Article › peer-review

17 Citations (Scopus)

Abstract

Ultra-smooth nanocrystalline diamond (UNCD) films with high-acoustic wave velocity were introduced into ZnO-based surface acoustic wave (SAW) devices to enhance their microfluidic efficiency by reducing the acoustic energy dissipation into the silicon substrate and improving the acoustic properties of the SAW devices. Microfluidic efficiency of the ZnO-based SAW devices with and without UNCD inter layers was investigated and compared. Results showed that the pumping velocities increase with the input power and those of the ZnO/UNCD/Si devices are much larger than those of the ZnO/Si devices at the same power. The jetting efficiency of the droplet was improved by introducing the UNCD interlayer into the ZnO/Si SAW device. Improvement in the microfluidic efficiency is mainly attributed to the diamond layer, which restrains the acoustic wave to propagate in the top layer rather than dissipating into the substrate.

Original language	English
Pages (from-to)	377-386
Journal	Microfluidics and Nanofluidics
Volume	15
Issue number	3
DOIs	https://doi.org/10.1007/s10404-013-1155-3
Publication status	Published - Sept 2013

Keywords

Nanocrystalline diamond film
surface acoustic wave
pumping and jetting
efficiency

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10.1007/s10404-013-1155-3

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title = "Enhancement of microfluidic efficiency with nanocrystalline diamond interlayer in the ZnO-based surface acoustic wave device",

abstract = "Ultra-smooth nanocrystalline diamond (UNCD) films with high-acoustic wave velocity were introduced into ZnO-based surface acoustic wave (SAW) devices to enhance their microfluidic efficiency by reducing the acoustic energy dissipation into the silicon substrate and improving the acoustic properties of the SAW devices. Microfluidic efficiency of the ZnO-based SAW devices with and without UNCD inter layers was investigated and compared. Results showed that the pumping velocities increase with the input power and those of the ZnO/UNCD/Si devices are much larger than those of the ZnO/Si devices at the same power. The jetting efficiency of the droplet was improved by introducing the UNCD interlayer into the ZnO/Si SAW device. Improvement in the microfluidic efficiency is mainly attributed to the diamond layer, which restrains the acoustic wave to propagate in the top layer rather than dissipating into the substrate.",

keywords = "Nanocrystalline diamond film, surface acoustic wave, pumping and jetting, efficiency",

author = "Hua-Feng Pang and Fu, \{Yong Qing\} and Luis Garcia-Gancedo and Samuele Porro and Jikui Luo and Frank Placido and Wilson, \{John I.\} and Andrew Flewitt and William Milne and Xiao-Tao Zu",

year = "2013",

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doi = "10.1007/s10404-013-1155-3",

language = "English",

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TY - JOUR

T1 - Enhancement of microfluidic efficiency with nanocrystalline diamond interlayer in the ZnO-based surface acoustic wave device

AU - Pang, Hua-Feng

AU - Fu, Yong Qing

AU - Garcia-Gancedo, Luis

AU - Porro, Samuele

AU - Luo, Jikui

AU - Placido, Frank

AU - Wilson, John I.

AU - Flewitt, Andrew

AU - Milne, William

AU - Zu, Xiao-Tao

PY - 2013/9

Y1 - 2013/9

N2 - Ultra-smooth nanocrystalline diamond (UNCD) films with high-acoustic wave velocity were introduced into ZnO-based surface acoustic wave (SAW) devices to enhance their microfluidic efficiency by reducing the acoustic energy dissipation into the silicon substrate and improving the acoustic properties of the SAW devices. Microfluidic efficiency of the ZnO-based SAW devices with and without UNCD inter layers was investigated and compared. Results showed that the pumping velocities increase with the input power and those of the ZnO/UNCD/Si devices are much larger than those of the ZnO/Si devices at the same power. The jetting efficiency of the droplet was improved by introducing the UNCD interlayer into the ZnO/Si SAW device. Improvement in the microfluidic efficiency is mainly attributed to the diamond layer, which restrains the acoustic wave to propagate in the top layer rather than dissipating into the substrate.

AB - Ultra-smooth nanocrystalline diamond (UNCD) films with high-acoustic wave velocity were introduced into ZnO-based surface acoustic wave (SAW) devices to enhance their microfluidic efficiency by reducing the acoustic energy dissipation into the silicon substrate and improving the acoustic properties of the SAW devices. Microfluidic efficiency of the ZnO-based SAW devices with and without UNCD inter layers was investigated and compared. Results showed that the pumping velocities increase with the input power and those of the ZnO/UNCD/Si devices are much larger than those of the ZnO/Si devices at the same power. The jetting efficiency of the droplet was improved by introducing the UNCD interlayer into the ZnO/Si SAW device. Improvement in the microfluidic efficiency is mainly attributed to the diamond layer, which restrains the acoustic wave to propagate in the top layer rather than dissipating into the substrate.

KW - Nanocrystalline diamond film

KW - surface acoustic wave

KW - pumping and jetting

KW - efficiency

UR - https://www.scopus.com/pages/publications/84883262543

U2 - 10.1007/s10404-013-1155-3

DO - 10.1007/s10404-013-1155-3

M3 - Article

SN - 1613-4982

VL - 15

SP - 377

EP - 386

JO - Microfluidics and Nanofluidics

JF - Microfluidics and Nanofluidics

IS - 3

ER -

Enhancement of microfluidic efficiency with nanocrystalline diamond interlayer in the ZnO-based surface acoustic wave device

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Keywords

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