Etching behaviour of pure and metal containing amorphous carbon films prepared using filtered cathodic vacuum arc technique

L. J. Yu, D. Sheeja, Beng Kang Tay, Daniel H. C. Chua, William Milne, Jianmin Miao, Yong Qing Fu

Research output: Contribution to journalArticlepeer-review

5 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Etching behaviour of pure and metal containing amorphous carbon films prepared using filtered cathodic vacuum arc technique'. Together they form a unique fingerprint.

Chemical Compounds

Engineering & Materials Science

Physics & Astronomy