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Etching behaviour of pure and metal containing amorphous carbon films prepared using filtered cathodic vacuum arc technique
L. J. Yu, D. Sheeja, Beng Kang Tay, Daniel H. C. Chua, William Milne, Jianmin Miao, Yong Qing Fu
Research output: Contribution to journal › Article › peer-review
5
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(Scopus)