TY - GEN
T1 - Evaluation of Process Parameters Influence on the Mechanical Properties of RF Magnetron Sputtered TiC Thin-Film Coating
AU - Abegunde, Olayinka Oluwatosin
AU - Akinlabi, Esther Titilayo
AU - Oladijo, Oluseyi Philip
N1 - Funding Information:
Acknowledgements The authors will like to acknowledge the Council for Scientific and Industrial Research (CSIR) for bursary awarded to the first Author.
Publisher Copyright:
© 2021, Springer Nature Singapore Pte Ltd.
PY - 2020/8/20
Y1 - 2020/8/20
N2 - The mechanical properties of a thin-film coating are very paramount to the development and applications for both research and industrial usages. Enhanced mechanical properties give vast options of applications, curb cost and mitigate the unprecedented failure of materials in services. Optimizing the process parameter is very crucial in developing thin-film coatings mechanical properties. Taguchi was used to develop the experimental matrix using three levels and three factors. Three different sputtering parameters were varied during the experimental process from low to high level. Mechanical characterizations using nanoindentation, nanoscratch and wear tests were performed on the samples to determine the optimal process parameter that yields the best mechanical properties. From Taguchi analysis, the RF power proves to be the most effective control factor in optimizing the hardness and Young’s modulus properties with a contribution rate of 70.4% and 84.4%, respectively.
AB - The mechanical properties of a thin-film coating are very paramount to the development and applications for both research and industrial usages. Enhanced mechanical properties give vast options of applications, curb cost and mitigate the unprecedented failure of materials in services. Optimizing the process parameter is very crucial in developing thin-film coatings mechanical properties. Taguchi was used to develop the experimental matrix using three levels and three factors. Three different sputtering parameters were varied during the experimental process from low to high level. Mechanical characterizations using nanoindentation, nanoscratch and wear tests were performed on the samples to determine the optimal process parameter that yields the best mechanical properties. From Taguchi analysis, the RF power proves to be the most effective control factor in optimizing the hardness and Young’s modulus properties with a contribution rate of 70.4% and 84.4%, respectively.
KW - ANOVA
KW - RF magnetron sputtering
KW - Taguchi
UR - http://www.scopus.com/inward/record.url?scp=85090513776&partnerID=8YFLogxK
U2 - 10.1007/978-981-15-4745-4_14
DO - 10.1007/978-981-15-4745-4_14
M3 - Conference contribution
AN - SCOPUS:85090513776
SN - 9789811547447
T3 - Lecture Notes in Mechanical Engineering
SP - 145
EP - 155
BT - Trends in Manufacturing and Engineering Management
A2 - Vijayan, S.
A2 - Subramanian, Nachiappan
A2 - Sankaranarayanasamy, K.
PB - Springer
CY - Singapore
T2 - 2nd International Conference on Mechanical Engineering Design, ICMechD 2019
Y2 - 25 April 2019 through 26 April 2019
ER -