@inproceedings{a60564c984604003bbcb482fb2ce779d,
title = "Evolution of microstructure and wear properties of aluminum thin films with sputtering substrate temperature",
abstract = "The influence of sputtering substrate temperature on the microstructure and wear properties of aluminum thin films deposited on stainless steel substrates by radio-frequency (RF) magnetron sputtering was studied. The aluminum films were deposited on stainless steel substrates at different temperatures of 70°C, 80°C and 100°C and at a constant power of 300 W. The surfaces of the films were then characterized by field emission scanning electron microscopy (FESEM), X-ray diffraction (XRD), surface profiling and wear methods. The wear was undertaken at extremely high sliding load of 50 N. Fine-grained and smooth microstructures exhibiting hillocks were observed at 70°C whereas coarse-grained and rough microstructures consisting of porous structures were obtained at 100°C. Defect-free and well-defined microstructures were obtained at 80°C. All the films obtained within this range of temperatures were crystalline according to the XRD results. Films obtained at 80°C were shown to have the highest coefficient of friction whereas those deposited at 100°C exhibited the lowest wear resistance. The films' failure along the edges of the balls under high sliding load were characterized by thinning, deformation and tearing (cracking).",
keywords = "Aluminum thin films, sputtering, substrate temperature, wear",
author = "Mwema, {Fredrick M.} and Akinlabi, {Esther T.} and Oladijo, {Oluseyi P.} and {Dutta Majumdar}, J.",
note = "Funding Information: ACKNOWLEDGMENT The authors would like to express their gratitude to University Research Committee (URC) for funding the researcher working on the sputtering of aluminum thin films. The efforts of Mr. Phiri Resego and Mr. Maphane Phalaneng, both from Botswana International University of Science & Technology (BIUST), for assisting on the sputtering process are highly appreciated. The immense assistance of Mr. Shree Krishna of the school of nanoscience at Indian Institute of Technology (IIT), Kharagpur on characterization is highly acknowledged. Mr. Leso of BIUST is also appreciated for his assistance on the wear experiments. Publisher Copyright: {\textcopyright} 2019 IEEE.; 10th IEEE International Conference on Mechanical and Intelligent Manufacturing Technologies, ICMIMT 2019 ; Conference date: 15-02-2019 Through 17-02-2019",
year = "2019",
month = may,
day = "9",
doi = "10.1109/ICMIMT.2019.8712046",
language = "English",
series = "2019 IEEE 10th International Conference on Mechanical and Intelligent Manufacturing Technologies, ICMIMT 2019",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "31--36",
booktitle = "2019 IEEE 10th International Conference on Mechanical and Intelligent Manufacturing Technologies, ICMIMT 2019",
address = "United States",
}