@article{7f27d89742d7480fb8f233e3684f45f4,
title = "Evolutions and distributions of Si nanocrystals and other Si oxidation states in Si-implanted SiO2 films",
abstract = "In this study, X-ray photoelectron spectroscopy (XPS) is used to study the annealing effects on the structure and chemical states of Si-rich SiOx (x",
author = "Dan Nicolau and Yang Liu and Chen, {Tu Pei} and Tse, {Man Siu} and Fu, {Yong Qing} and Uwe Muller and Dell, {John M.}",
year = "2004",
month = mar,
day = "29",
doi = "10.1117/12.529936",
language = "English",
volume = "5275",
pages = "374--377",
journal = "Proceedings of SPIE - The International Society for Optical Engineering",
issn = "0277-786X",
publisher = "SPIE",
}