Fabrication of micromachined TiNi-based microgripper with complaint structure

Yong Qing Fu; Hejun Du

doi:10.1117/12.498184

Fabrication of micromachined TiNi-based microgripper with complaint structure

Yong Qing Fu, Hejun Du

Mathematics, Physics and Electrical Engineering

Research output: Contribution to journal › Article › peer-review

11 Citations (Scopus)

Abstract

One of the problems faced in the development of micro-gripper is that the actuation displacement or force is too small. In this study, it is aimed to solve this problem with application of shape memory and compliant mechanisms. TiNi film based micro-gripper with compliant structure was design, simulated and fabricated. Some important issues regarding to the preparation of high performance shape memory TiNi films using sputtering methods were discussed.

Original language	English
Pages (from-to)	38-47
Journal	Proceedings of SPIE - The International Society for Optical Engineering
Volume	5116
DOIs	https://doi.org/10.1117/12.498184
Publication status	Published - 25 Apr 2003

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title = "Fabrication of micromachined TiNi-based microgripper with complaint structure",

abstract = "One of the problems faced in the development of micro-gripper is that the actuation displacement or force is too small. In this study, it is aimed to solve this problem with application of shape memory and compliant mechanisms. TiNi film based micro-gripper with compliant structure was design, simulated and fabricated. Some important issues regarding to the preparation of high performance shape memory TiNi films using sputtering methods were discussed.",

author = "Fu, {Yong Qing} and Hejun Du",

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AB - One of the problems faced in the development of micro-gripper is that the actuation displacement or force is too small. In this study, it is aimed to solve this problem with application of shape memory and compliant mechanisms. TiNi film based micro-gripper with compliant structure was design, simulated and fabricated. Some important issues regarding to the preparation of high performance shape memory TiNi films using sputtering methods were discussed.

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JO - Proceedings of SPIE - The International Society for Optical Engineering

JF - Proceedings of SPIE - The International Society for Optical Engineering

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Fabrication of micromachined TiNi-based microgripper with complaint structure

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