Fabrication of micron scale metallic structures on photo paper substrates by low temperature photolithography for device applications

M D Cooke, David Wood

Research output: Contribution to journalArticlepeer-review

2 Citations (Scopus)
1 Downloads (Pure)

Abstract

Using commercial standard paper as a substrate has a significant cost reduction implication over other more expensive substrate materials by approximately a factor of 100 (Shenton et al 2015 EMRS Spring Meeting; Zheng et al 2013 Nat. Sci. Rep. 3 1786). Discussed here is a novel process which allows photolithography and etching of simple metal films deposited on paper substrates, but requires no additional facilities to achieve it. This allows a significant reduction in feature size down to the micron scale over devices made using more conventional printing solutions which are of the order of tens of microns. The technique has great potential for making cheap disposable devices with additional functionality, which could include flexibility and foldability, simple disposability, porosity and low weight requirements. The potential for commercial applications and scale up is also discussed.
Original languageEnglish
Article number115017
JournalJournal of Micromechanics and Microengineering
Volume25
Issue number11
DOIs
Publication statusPublished - 7 Oct 2015

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