FIB Etching for Photonic Device Applications

Martin J.  Cryan; Y-L. Daniel Ho; Pavel S. Ivanov; Peter J. Heard; Judy Rorison; John G.  Rarity

FIB Etching for Photonic Device Applications

Martin J. Cryan, Y-L. Daniel Ho, Pavel S. Ivanov, Peter J. Heard, Judy Rorison, John G. Rarity

Research output: Chapter in Book/Report/Conference proceeding › Chapter › peer-review

Original language	English
Title of host publication	Nanofabrication Using Focused Ion and Electron Beams
Subtitle of host publication	Principles and Applications
Editors	Ivo Utke, Stanislav Moshkalev, Phillip E. Russell
Place of Publication	New York
Publisher	Oxford University Press
Chapter	18
Pages	553-583
Number of pages	31
Edition	1st
ISBN (Print)	9780199734214, 0199734216
Publication status	Published - 24 May 2012
Externally published	Yes

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Cite this

Cryan, M. J., Ho, Y.-L. D., Ivanov, P. S., Heard, P. J., Rorison, J., & Rarity, J. G. (2012). FIB Etching for Photonic Device Applications. In I. Utke, S. Moshkalev, & P. E. Russell (Eds.), Nanofabrication Using Focused Ion and Electron Beams: Principles and Applications (1st ed., pp. 553-583). Oxford University Press. https://global.oup.com/academic/product/nanofabrication-using-focused-ion-and-electron-beams-9780199734214?cc=gb&lang=en&

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title = "FIB Etching for Photonic Device Applications",

author = "Cryan, {Martin J.} and Ho, {Y-L. Daniel} and Ivanov, {Pavel S.} and Heard, {Peter J.} and Judy Rorison and Rarity, {John G.}",

year = "2012",

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day = "24",

language = "English",

isbn = "9780199734214",

pages = "553--583",

editor = "Utke, { Ivo} and Stanislav Moshkalev and Russell, {Phillip E.}",

booktitle = "Nanofabrication Using Focused Ion and Electron Beams",

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edition = "1st",

}

Cryan, MJ, Ho, Y-LD, Ivanov, PS, Heard, PJ, Rorison, J & Rarity, JG 2012, FIB Etching for Photonic Device Applications. in I Utke, S Moshkalev & PE Russell (eds), Nanofabrication Using Focused Ion and Electron Beams: Principles and Applications. 1st edn, Oxford University Press, New York, pp. 553-583. <https://global.oup.com/academic/product/nanofabrication-using-focused-ion-and-electron-beams-9780199734214?cc=gb&lang=en&>

FIB Etching for Photonic Device Applications. / Cryan, Martin J. ; Ho, Y-L. Daniel; Ivanov, Pavel S. et al.
Nanofabrication Using Focused Ion and Electron Beams: Principles and Applications. ed. / Ivo Utke; Stanislav Moshkalev; Phillip E. Russell. 1st. ed. New York: Oxford University Press, 2012. p. 553-583.

Research output: Chapter in Book/Report/Conference proceeding › Chapter › peer-review

TY - CHAP

T1 - FIB Etching for Photonic Device Applications

AU - Cryan, Martin J.

AU - Ho, Y-L. Daniel

AU - Ivanov, Pavel S.

AU - Heard, Peter J.

AU - Rorison, Judy

AU - Rarity, John G.

PY - 2012/5/24

Y1 - 2012/5/24

UR - https://books.google.co.uk/books?id=f6ZzDIx1bhYC&pg=PA553&dq=PART+II+-+APPLICATIONS:+18.+FIB+Etching+for+Photonic+Device+Applications&hl=zh-TW&sa=X&ved=0ahUKEwj59Me8mNHkAhU4QxUIHSpaDaAQ6AEIKjAA#v=onepage&q=PART%20II%20-%20APPLICATIONS%3A%2018.%20FIB%20Etching%20for%20Photonic%20Device%20Applications&f=false

M3 - Chapter

SN - 9780199734214

SN - 0199734216

SP - 553

EP - 583

BT - Nanofabrication Using Focused Ion and Electron Beams

A2 - Utke, Ivo

A2 - Moshkalev, Stanislav

A2 - Russell, Phillip E.

PB - Oxford University Press

CY - New York

ER -

FIB Etching for Photonic Device Applications

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