Fiber temperature sensor utilizing a thermomechanical MEMS detector

Engineering

• Microelectromechanical System 100%
• Temperature 33%
• Fiber 25%
• Elements 16%
• Sensor 16%
• Response Time 16%
• Measurement 8%
• Single Mode Fibers 8%
• Graded Index 8%
• Architecture 8%
• Photodetector 8%
• Lenses 8%
• Membrane 8%
• Measurement Range 8%
• Detector Element 8%
• Thermal Sensor 8%

Physics

• Fibers 25%
• Temperature 25%
• Optical Fiber 16%
• Displacement 16%
• Shapes 8%
• Substitutes 8%
• Standard 8%
• Plane 8%
• Photometer 8%
• Membrane 8%
• Titanium 8%
• Diffraction Grating 8%
• Time Constant 8%
• Laser Source 8%