Flexible Printed Circuit Board as Novel Electrodes for Acoustofluidic Devices

Chao Sun, Roman Mikhaylov, Richard Fu, Fangda Wu, Hanlin Wang, Xichen Yuan, Zhihua Xie, Dongfang Liang, Zhenlin Wu, Xin Yang*

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

19 Citations (Scopus)
164 Downloads (Pure)


Surface acoustic wave (SAW)-based acoustofluidics shows broad applications in biomedicine and chemistry. Conventional manufacturing process for SAW devices uses photolithography and metal deposition, thus requires accessing cleanroom facilities. This study presents an efficient and versatile technique based on a flexible printed circuit board (FPCB) for developing SAW acoustofluidic devices. By mechanically clamping interdigital electrodes (IDEs) made on the FPCB onto a piezoelectric substrate, SAWs can be effectively generated with an additional matching network. The SAW amplitudes were measured by a laser vibrometer, which increases with the applied input voltage. The FPCB-SAW device has been applied to actuate 10- μm microspheres to form strong streaming vortices inside a droplet, and to drive a sessile droplet for transportation on the substrate surface. The use of the FPCB rather than a rigid printed circuit board (PCB) can help cut down on the overall footprint of the device and save space. The low requirement in assembling the FPCB-SAW device can facilitate versatile acoustofluidic applications by providing fast prototyping devices.
Original languageEnglish
Pages (from-to)393-398
Number of pages6
JournalIEEE Transactions on Electron Devices
Issue number1
Early online date8 Dec 2020
Publication statusPublished - 1 Jan 2021


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