High Resolution and Fast Response of Humidity Sensor Based on AlN Cantilever with Two Groups of Segmented Electrodes

Dongsheng Li, Hanyong Dong, Zihao Xie, Qian Zhang, Mengjiao Qu, Richard Fu, Jin Xie*

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

Fingerprint

Dive into the research topics of 'High Resolution and Fast Response of Humidity Sensor Based on AlN Cantilever with Two Groups of Segmented Electrodes'. Together they form a unique fingerprint.

Chemical Compounds

Engineering & Materials Science