TY - JOUR
T1 - Highly sensitive and fast response Love wave mode humidity sensor based on MoS2@Ti3C2Tx hierarchical structure
AU - Li, Chong
AU - Tao, Ran
AU - Li, Zhiqiong
AU - Liao, Jiahui
AU - Fu, Chen
AU - Zhang, Jikai
AU - Ong, Hui Ling
AU - Lu, Chenze
AU - Luo, Jingting
AU - Fu, Yongqing (Richard)
N1 - Funding information: This work was financially supported by the National Natural Science Foundation of China (NSFC Grant no. 12104320), National Key Research and Development Program of China (Grant no. 2021YFF0603704), Research Project in Fundamental and Application Fields of Guangdong Province(Grant no. 020A1515110561, 2019A1515111199), Research and Development Program of Guangdong Province (Grant no. 2020B0101040002), Key Research Program of Education Department for Guangdong Province (Grant no. 2020ZDZX2007), Shenzhen Science & Technology Project (Grant no. RCBS20200714114918249, GJHZ20200731095803010), Start-up Research Foundation of Shenzhen University (Grant no.QNJS0352), Engineering and Physical Sciences Research Council of UK (EPSRC EP/P018998/1), Special Interest Group for Acoustofluidics from UK Fluids Network (EP/N032861/1), International Exchange Grant (IEC/NSFC/201078) through the Royal Society and NSFC, and EPSRC NetworkPlus in Digitalised Surface Manufacturing (EP/S036180/1).
PY - 2023/7/15
Y1 - 2023/7/15
N2 - Humidity sensing is crucial for food production, environmental monitoring, microelectronic manufacture, and common living conditions. Thus, there is a high demand for development of high-performance humidity sensors with good stability, high precision and fast responses. In this study, Love wave mode humidity sensors were prepared using quartz-based SAW devices coated with composite sensing layers of accordion-like Ti3C2Tx, MoS2 nanoflowers and MoS2 @Ti3C2Tx hierarchical structure, respectively. The hydrophilic Ti3C2Tx was used to provide abundant surface functional groups for adsorption of water molecules, and the hydrophobic MoS2 enabled rapid adsorption and desorption of water molecules from the surface of MoS2 @Ti3C2Tx. The MoS2 @Ti3C2Tx coated Love wave humidity sensor presented an ultra-high sensitivity of 0.67 kHz/% RH in the wide humidity range from 11.3% RH to 97.3% RH, mainly attributed to the hierarchical structure of MoS2 @Ti3C2Tx with large specific surface areas, abundant adsorption sites and superhydrophilicity. Meanwhile, this Love wave humidity sensor showed fast response/recovery rates, great repeatability and long-term stability, indicating its great prospects in humidity detection applications.
AB - Humidity sensing is crucial for food production, environmental monitoring, microelectronic manufacture, and common living conditions. Thus, there is a high demand for development of high-performance humidity sensors with good stability, high precision and fast responses. In this study, Love wave mode humidity sensors were prepared using quartz-based SAW devices coated with composite sensing layers of accordion-like Ti3C2Tx, MoS2 nanoflowers and MoS2 @Ti3C2Tx hierarchical structure, respectively. The hydrophilic Ti3C2Tx was used to provide abundant surface functional groups for adsorption of water molecules, and the hydrophobic MoS2 enabled rapid adsorption and desorption of water molecules from the surface of MoS2 @Ti3C2Tx. The MoS2 @Ti3C2Tx coated Love wave humidity sensor presented an ultra-high sensitivity of 0.67 kHz/% RH in the wide humidity range from 11.3% RH to 97.3% RH, mainly attributed to the hierarchical structure of MoS2 @Ti3C2Tx with large specific surface areas, abundant adsorption sites and superhydrophilicity. Meanwhile, this Love wave humidity sensor showed fast response/recovery rates, great repeatability and long-term stability, indicating its great prospects in humidity detection applications.
KW - Surface acoustic waves
KW - Humidity sensing
KW - Hierarchical structure
KW - MXenes
KW - Nanoflowers
UR - http://www.scopus.com/inward/record.url?scp=85152401080&partnerID=8YFLogxK
U2 - 10.1016/j.snb.2023.133823
DO - 10.1016/j.snb.2023.133823
M3 - Article
SN - 0925-4005
VL - 387
SP - 1
EP - 11
JO - Sensors and Actuators B: Chemical
JF - Sensors and Actuators B: Chemical
M1 - 133823
ER -
