Highly sensitive ultraviolet sensor based on ZnO nanorod film deposited on ST-cut quartz surface acoustic wave devices

W. Li; Y.J. Guo; Q.B. Tang; X.T. Zu; J.Y. Ma; L. Wang; K. Tao; H. Torun; Y.Q. Fu

doi:10.1016/J.SURFCOAT.2019.02.041

Highly sensitive ultraviolet sensor based on ZnO nanorod film deposited on ST-cut quartz surface acoustic wave devices

W. Li, Y.J. Guo, Q.B. Tang, X.T. Zu, J.Y. Ma, L. Wang, K. Tao, H. Torun, Y.Q. Fu

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Abstract

A highly sensitive surface acoustic wave (SAW) ultraviolet (UV) detector operated at room temperature was developed using a sensing layer of zinc oxide (ZnO) nanorods (NRs) grown on ST-cut quartz using a hydrothermal method. Under illumination of the UV light with a wavelength of 365 nm and an intensity of 6 μW cm−2, the resonant frequency of the SAW UV sensor based on ZnO NRs/ZnO nanofilm structure was decreased by ~200 Hz, mainly due to electroacoustic effect. The estimated enhancement in the sensitivity based on the experimental results is ~3.5 folds compared to a device with only a thin nanolayer ZnO film. Meanwhile, density of ZnO NRs over the ZnO seed layer was also investigated and an optimum design was proposed.

Original language	English
Pages (from-to)	419-425
Number of pages	7
Journal	Surface and Coatings Technology
Volume	363
Early online date	15 Feb 2019
DOIs	https://doi.org/10.1016/J.SURFCOAT.2019.02.041
Publication status	Published - 15 Apr 2019

Keywords

SAW device
UV detector
ZnO nanorods
ST-cut quartz

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10.1016/J.SURFCOAT.2019.02.041

SCT revised manuscript nanowireAccepted author manuscript, 1.63 MBLicence: CC BY-NC-ND

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title = "Highly sensitive ultraviolet sensor based on ZnO nanorod film deposited on ST-cut quartz surface acoustic wave devices",

abstract = "A highly sensitive surface acoustic wave (SAW) ultraviolet (UV) detector operated at room temperature was developed using a sensing layer of zinc oxide (ZnO) nanorods (NRs) grown on ST-cut quartz using a hydrothermal method. Under illumination of the UV light with a wavelength of 365 nm and an intensity of 6 μW cm−2, the resonant frequency of the SAW UV sensor based on ZnO NRs/ZnO nanofilm structure was decreased by \textasciitilde{}200 Hz, mainly due to electroacoustic effect. The estimated enhancement in the sensitivity based on the experimental results is \textasciitilde{}3.5 folds compared to a device with only a thin nanolayer ZnO film. Meanwhile, density of ZnO NRs over the ZnO seed layer was also investigated and an optimum design was proposed.",

keywords = "SAW device, UV detector, ZnO nanorods, ST-cut quartz",

author = "W. Li and Y.J. Guo and Q.B. Tang and X.T. Zu and J.Y. Ma and L. Wang and K. Tao and H. Torun and Y.Q. Fu",

year = "2019",

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doi = "10.1016/J.SURFCOAT.2019.02.041",

language = "English",

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journal = "Surface and Coatings Technology",

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T1 - Highly sensitive ultraviolet sensor based on ZnO nanorod film deposited on ST-cut quartz surface acoustic wave devices

AU - Li, W.

AU - Guo, Y.J.

AU - Tang, Q.B.

AU - Zu, X.T.

AU - Ma, J.Y.

AU - Wang, L.

AU - Tao, K.

AU - Torun, H.

AU - Fu, Y.Q.

PY - 2019/4/15

Y1 - 2019/4/15

N2 - A highly sensitive surface acoustic wave (SAW) ultraviolet (UV) detector operated at room temperature was developed using a sensing layer of zinc oxide (ZnO) nanorods (NRs) grown on ST-cut quartz using a hydrothermal method. Under illumination of the UV light with a wavelength of 365 nm and an intensity of 6 μW cm−2, the resonant frequency of the SAW UV sensor based on ZnO NRs/ZnO nanofilm structure was decreased by ~200 Hz, mainly due to electroacoustic effect. The estimated enhancement in the sensitivity based on the experimental results is ~3.5 folds compared to a device with only a thin nanolayer ZnO film. Meanwhile, density of ZnO NRs over the ZnO seed layer was also investigated and an optimum design was proposed.

AB - A highly sensitive surface acoustic wave (SAW) ultraviolet (UV) detector operated at room temperature was developed using a sensing layer of zinc oxide (ZnO) nanorods (NRs) grown on ST-cut quartz using a hydrothermal method. Under illumination of the UV light with a wavelength of 365 nm and an intensity of 6 μW cm−2, the resonant frequency of the SAW UV sensor based on ZnO NRs/ZnO nanofilm structure was decreased by ~200 Hz, mainly due to electroacoustic effect. The estimated enhancement in the sensitivity based on the experimental results is ~3.5 folds compared to a device with only a thin nanolayer ZnO film. Meanwhile, density of ZnO NRs over the ZnO seed layer was also investigated and an optimum design was proposed.

KW - SAW device

KW - UV detector

KW - ZnO nanorods

KW - ST-cut quartz

UR - https://www.scopus.com/pages/publications/85062237926

U2 - 10.1016/J.SURFCOAT.2019.02.041

DO - 10.1016/J.SURFCOAT.2019.02.041

M3 - Article

SN - 0257-8972

VL - 363

SP - 419

EP - 425

JO - Surface and Coatings Technology

JF - Surface and Coatings Technology

ER -

Highly sensitive ultraviolet sensor based on ZnO nanorod film deposited on ST-cut quartz surface acoustic wave devices

Abstract

Keywords

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